Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385138 | Plasma-enhanced deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joseph L. Womack, Keith Fox, John B. Alexy +5 more | 2025-08-12 |
| 12217985 | Wafer placement correction in indexed multi-station processing chambers | Stephen Topping | 2025-02-04 |
| 11746420 | PECVD apparatus for in-situ deposition of film stacks | Pramod Subramonium, Joseph L. Womack, Keith Fox | 2023-09-05 |
| 10214816 | PECVD apparatus for in-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joseph L. Womack, Keith Fox, John B. Alexy +5 more | 2019-02-26 |
| 9370812 | Reshaping device and positioning assembly thereof | Wei-Zhong Dai | 2016-06-21 |
| 9165788 | Post-deposition soft annealing | Keith Fox, Bart J. van Schravendijk, Lucas Benjamin HENDERSON, Joseph L. Womack | 2015-10-20 |
| 9028924 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joe Womack, Keith Fox, John B. Alexy +5 more | 2015-05-12 |
| 8895415 | Tensile stressed doped amorphous silicon | Keith Fox, Joseph L. Womack | 2014-11-25 |
| 8741394 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joe Womack, Keith Fox, John B. Alexy +5 more | 2014-06-03 |
| 8709551 | Smooth silicon-containing films | Keith Fox, Joe Womack, Mandyam Sriram, George Andrew Antonelli, Bart J. van Schravendijk +1 more | 2014-04-29 |
| 7781351 | Methods for producing low-k carbon doped oxide films with low residual stress | Qingguo Wu, Haiying Fu, Ananda K. Bandyopadhyay, David Mordo | 2010-08-24 |
| 7390537 | Methods for producing low-k CDO films with low residual stress | Qingguo Wu, Haiying Fu | 2008-06-24 |
| 7381662 | Methods for improving the cracking resistance of low-k dielectric materials | Haiying Fu, Brian Lu, Feng Wang | 2008-06-03 |
| 7326444 | Methods for improving integration performance of low stress CDO films | Qingguo Wu, Honghong Wang, Haiying Fu | 2008-02-05 |
| 7094713 | Methods for improving the cracking resistance of low-k dielectric materials | Haiying Fu, Brian Lu, Feng Wang | 2006-08-22 |