Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343666 | Damascene metal-insulator-metal (MIM) device with improved scaleability | Suzette K. Pangrle, Steven C. Avanzino, Sameer Haddad, Michael VanBuskirk, Manuj Rathor +5 more | 2016-05-17 |
| 8232175 | Damascene metal-insulator-metal (MIM) device with improved scaleability | Suzette K. Pangrle, Steven C. Avanzino, Sameer Haddad, Michael VanBuskirk, Manuj Rathor +5 more | 2012-07-31 |
| 8089113 | Damascene metal-insulator-metal (MIM) device | Suzette K. Pangrle, Steven C. Avanzino, Sameer Haddad, Michael VanBuskirk, Manuj Rathor +5 more | 2012-01-03 |
| 7468296 | Thin film germanium diode with low reverse breakdown | Ercan Adem, Matthew S. Buynoski, Robert J. Chiu, Calvin T. Gabriel, Joong S. Jeon +5 more | 2008-12-23 |
| 7173648 | System and method for visually monitoring a semiconductor processing system | Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh | 2007-02-06 |
| 7080330 | Concurrent measurement of critical dimension and overlay in semiconductor manufacturing | Bharath Rangarajan, Bhanwar Singh, Carmen Morales | 2006-07-18 |
| 6912438 | Using scatterometry to obtain measurements of in circuit structures | Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan | 2005-06-28 |
| 6884999 | Use of scanning probe microscope for defect detection and repair | Sanjay K. Yedur, Bhanwar Singh | 2005-04-26 |
| 6829380 | Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM system | Bhanwar Singh, Sanjay K. Yedur | 2004-12-07 |
| 6635874 | Self-cleaning technique for contamination on calibration sample in SEM | Bhanwar Singh, Michael K. Templeton, Sanjay K. Yedur | 2003-10-21 |
| 6634805 | Parallel plate development | Michael K. Templeton, Khoi A. Phan, Bharath Rangarajan, Ramkumar Subramanian | 2003-10-21 |
| 6632283 | System and method for illuminating a semiconductor processing system | Bhanwar Singh, Bharath Rangarajan, Khoi A. Phan, Ramkumar Subramanian | 2003-10-14 |
| 6591658 | Carbon nanotubes as linewidth standards for SEM & AFM | Sanjay K. Yedur, Bhanwar Singh, Michael K. Templeton, Ramkumar Subramanian | 2003-07-15 |
| 6572252 | System and method for illuminating a semiconductor processing system | Bharath Rangarajan, Bhanwar Singh, Khoi A. Phan, Ramkumar Subramanian | 2003-06-03 |
| 6566655 | Multi-beam SEM for sidewall imaging | Bhanwar Singh, Sanjay K. Yedur | 2003-05-20 |
| 6559446 | System and method for measuring dimensions of a feature having a re-entrant profile | Bhanwar Singh | 2003-05-06 |
| 6516528 | System and method to determine line edge roughness and/or linewidth | Bhanwar Singh | 2003-02-11 |
| 6507474 | Using localized ionizer to reduce electrostatic charge from wafer and mask | Bhanwar Singh, Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan | 2003-01-14 |
| 6479820 | Electrostatic charge reduction of photoresist pattern on development track | Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan, Khoi A. Phan | 2002-11-12 |
| 6479817 | Cantilever assembly and scanning tip therefor with associated optical sensor | Sanjay K. Yedur, Bhanwar Singh, Carmen Morales | 2002-11-12 |
| 6462343 | System and method of providing improved CD-SEM pattern recognition of structures with variable contrast | — | 2002-10-08 |
| 6459482 | Grainless material for calibration sample | Bhanwar Singh, Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Michael K. Templeton +1 more | 2002-10-01 |
| 6455847 | Carbon nanotube probes in atomic force microscope to detect partially open/closed contacts | Sanjay K. Yedur, Bhanwar Singh | 2002-09-24 |
| 6451512 | UV-enhanced silylation process to increase etch resistance of ultra thin resists | Bharath Rangarajan, Ramkumar Subramanian, Khoi A. Phan, Bhanwar Singh, Michael K. Templeton +1 more | 2002-09-17 |
| 6452161 | Scanning probe microscope having optical fiber spaced from point of hp | Sanjay K. Yedur, Bhanwar Singh, Carmen Morales | 2002-09-17 |