BV

Bo H. Vanderberg

AT Axcelis Technologies: 42 patents #1 of 300Top 1%
Overall (All Time): #70,590 of 4,157,543Top 2%
43
Patents All Time

Issued Patents All Time

Showing 25 most recent of 43 patents

Patent #TitleCo-InventorsDate
11114270 Scanning magnet design with enhanced efficiency Edward C. Eisner 2021-09-07
11037754 Scan and corrector magnet designs for high throughput scanned beam ion implanter Edward C. Eisner 2021-06-15
10573485 Tetrode extraction apparatus for ion source Wilhelm Platow, Edward C. Eisner, Neil J. Bassom, Michael Cristoforo, Joshua Abeshaus 2020-02-25
10553392 Scan and corrector magnet designs for high throughput scanned beam ion implanter Edward C. Eisner 2020-02-04
10483086 Beam profiling speed enhancement for scanned beam implanters Andy Ray, Edward C. Eisner 2019-11-19
10037877 Ion implantation system having beam angle control in drift and deceleration modes Edward C. Eisner 2018-07-31
9711329 System and method to improve productivity of hybrid scan ion beam implanters Andy Ray 2017-07-18
9679739 Combined electrostatic lens system for ion implantation Edward C. Eisner 2017-06-13
9443698 Hybrid scanning for ion implantation 2016-09-13
9318302 Integrated extraction electrode manipulator for ion source Joseph Valinski, Michael Cristoforo 2016-04-19
8963107 Beam line design to reduce energy contamination Edward C. Eisner 2015-02-24
8760054 Microwave plasma electron flood William F. DiVergilio 2014-06-24
8637838 System and method for ion implantation with improved productivity and uniformity Edward C. Eisner 2014-01-28
8502173 System and method for ion implantation with improved productivity and uniformity Steven C. Hays, Andy Ray 2013-08-06
8378313 Uniformity of a scanned ion beam Edward C. Eisner, Andy Ray 2013-02-19
8278634 System and method for ion implantation with improved productivity and uniformity Steven C. Hays, Andy Ray 2012-10-02
8237135 Enhanced low energy ion beam transport in ion implantation William F. DiVergilio 2012-08-07
8138484 Magnetic scanning system with improved efficiency 2012-03-20
8124947 Ion implanter having combined hybrid and double mechanical scan architecture Manny Sieradzki, Patrick Splinter 2012-02-28
8124946 Post-decel magnetic energy filter for ion implantation systems Geoffrey Ryding, Theodore H. Smick, Marvin Farley, Takao Sakase 2012-02-28
7897944 Method and apparatus for measurement of beam angle in ion implantation Robert J. Mitchell 2011-03-01
7800083 Plasma electron flood for ion beam implanter William F. DiVergilio 2010-09-21
7750320 System and method for two-dimensional beam scan across a workpiece of an ion implanter Joseph Ferrara, Michael Graf 2010-07-06
7701230 Method and system for ion beam profiling John Zheng Ye, Michael Cristoforo, Yongzhang Huang, Michael Graf 2010-04-20
7696494 Beam angle adjustment in ion implanters Xiangyang Wu 2010-04-13