Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051574 | Wafer processing method and plasma processing apparatus | Hiroyuki Kobayashi, Tatehito Usui, Soichiro Eto, Shigeru Nakamoto, Kazunori Shinoda +1 more | 2024-07-30 |
| 11875978 | Plasma processing apparatus and plasma processing method | Tsubasa Okamoto, Tatehito Usui, Miyako Matsui, Shigeru Nakamoto, Naohiro Kawamoto | 2024-01-16 |
| 11798552 | Agent device, agent control method, and program | Hiroshi Sugihara, Yuki Matsuura, Eisuke Soma, Wataru Endo, Ryosuke Tanaka +1 more | 2023-10-24 |
| 11195700 | Etching apparatus | Hidekazu Suzuki, Masami Shibagaki | 2021-12-07 |
| 11176948 | Agent device, agent presentation method, and storage medium | Hiroshi Sugihara, Ryosuke Tanaka, Yuki Matsuura, Wataru Endo, Eisuke Soma | 2021-11-16 |
| 11014508 | Communication support system, communication support method, and storage medium | Wataru Endo, Hiroshi Sugihara | 2021-05-25 |
| 10994612 | Agent system, agent control method, and storage medium | Hiroshi Sugihara | 2021-05-04 |
| 10685815 | Plasma processing apparatus and device manufacturing method | Ryo Matsuhashi, Hiroshi Akasaka, Yoshimitsu Kodaira, Naoko Matsui | 2020-06-16 |
| 7727680 | Hologram recording sheet, holographic optical element using said sheet, and its production process | Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Hideyuki Iriyama | 2010-06-01 |
| 7618750 | Hologram recording sheet, holographic optical element using said sheet, and its production process | Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Hideyuki Iriyama | 2009-11-17 |
| 7579119 | Hologram recording sheet, holographic optical element using said sheet, and its production process | Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Hideyuki Iriyama | 2009-08-25 |
| 7479354 | Hologram recording sheet, holographic optical element using said sheet, and its production process | Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Hideyuki Iriyama | 2009-01-20 |
| 7132200 | Hologram recording sheet, holographic optical element using said sheet, and its production process | Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Hideyuki Iriyama | 2006-11-07 |
| 6887522 | Method for forming a copper thin film | Masami Shibagaki, Tomoaki Koide, Takafumi Kuninobu, Kaoru Suzuki | 2005-05-03 |
| 6726954 | Method and system for forming copper thin film | Minjuan Zhang, Akiko Kobayashi, Toshiaki Sasaki, Susumu Akiyama | 2004-04-27 |
| 6562219 | Method for the formation of copper wiring films | Akiko Kobayashi, Tomoaki Koide, Minjuan Zhang, Hideki Sunayama, Shiqin Xiao +1 more | 2003-05-13 |
| 6471781 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Ryoki Tobe, Yasuaki Tanaka, Hitoshi Jimba, So Won Kim | 2002-10-29 |
| 6468604 | Method for manufacturing a titanium nitride thin film | Ryoki Tobe, Hiroshi Doi | 2002-10-22 |
| 6433886 | Image forming method and image forming apparatus | — | 2002-08-13 |
| 6387444 | Single substrate processing CVD procedure for depositing a metal film using first and second CVD processes in first and second process chambers | Osamu Okada | 2002-05-14 |
| 6340540 | Hologram recording sheet holographic optical element using said sheet and its production process | Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Hideyuki Iriyama | 2002-01-22 |
| 6291109 | Hologram and method of and apparatus for producing the same | Kazuhiro Suga, Kenji Ueda, Hiroyuki Nishimura | 2001-09-18 |
| 6127066 | Hologram recording sheet, holographic optical element using said sheet, and its production process | Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Hideyuki Iriyama | 2000-10-03 |
| 6080446 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Ryoki Tobe, Yasuaki Tanaka, Hitoshi Jimba, So Won Kim | 2000-06-27 |
| 5993679 | Method of cleaning metallic films built up within thin film deposition apparatus | Tomoaki Koide, Akiko Kobayashi, Ko Sang Tae, Osamu Okada | 1999-11-30 |