Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5993679 | Method of cleaning metallic films built up within thin film deposition apparatus | Tomoaki Koide, Akiko Kobayashi, Atsushi Sekiguchi, Osamu Okada | 1999-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5993679 | Method of cleaning metallic films built up within thin film deposition apparatus | Tomoaki Koide, Akiko Kobayashi, Atsushi Sekiguchi, Osamu Okada | 1999-11-30 |