Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195700 | Etching apparatus | Hidekazu Suzuki, Atsushi Sekiguchi | 2021-12-07 |
| 9991119 | Heat treatment method and heat treatment apparatus for semiconductor substrate | Yasuko Shinoda | 2018-06-05 |
| 9603195 | Substrate heat treatment apparatus | Kaori Mashimo | 2017-03-21 |
| 9431281 | Temperature control method for substrate heat treatment apparatus, semiconductor device manufacturing method, temperature control program for substrate heat treatment apparatus, and recording medium | Kaori Mashimo | 2016-08-30 |
| 9147742 | Heat treatment apparatus and semiconductor device manufacturing method | Hiroshi Doi, Yuichi Sasuga | 2015-09-29 |
| 8691676 | Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat treating apparatus, and recording medium | Kaori Mashimo | 2014-04-08 |
| 8426323 | Substrate processing apparatus, substrate annealing method, and semiconductor device manufacturing method | Nobuyuki Masaki, Yuichi Sasuga, Hiroshi Doi | 2013-04-23 |
| 8198182 | Annealing method for semiconductor device with silicon carbide substrate and semiconductor device | Akihiro Egami | 2012-06-12 |
| 8187958 | Substrate processing method and method of manufacturing crystalline silicon carbide (SIC) substrate | Masataka Satoh, Takahiro Sugimoto | 2012-05-29 |
| 8150243 | Heating process apparatus | Akira Kumagai, Kenji Numajiri, Akihiro Egami | 2012-04-03 |
| 8147242 | Substrate supporting/transferring tray | Yasumi Kurematsu | 2012-04-03 |
| 8129663 | Vacuum heating apparatus | Nobuyuki Masaki, Yuichi Sasuga, Hiroshi Doi | 2012-03-06 |
| 8090245 | Apparatus for heat-treating substrate and method for heat-treating substrate | — | 2012-01-03 |
| 8032015 | Heating apparatus, heating method, and semiconductor device manufacturing method | Hiroshi Doi | 2011-10-04 |
| 7897523 | Substrate heating apparatus, heating method, and semiconductor device manufacturing method | Hiroshi Doi, Akihiro Egami, Toshiaki Sasaki, Shinya Hasegawa | 2011-03-01 |
| 7807553 | Substrate heating apparatus and semiconductor fabrication method | Kenji Numajiri, Akihiro Egami, Akira Kumagai, Susumu Akiyama | 2010-10-05 |
| 7780440 | Substrate supporting/transferring tray | Yasumi Kurematsu | 2010-08-24 |
| 7732739 | Substrate heat treatment apparatus and substrate transfer tray used in substrate heat treatment | Yasumi Kurematsu | 2010-06-08 |
| 6887522 | Method for forming a copper thin film | Atsushi Sekiguchi, Tomoaki Koide, Takafumi Kuninobu, Kaoru Suzuki | 2005-05-03 |
| 4885054 | Etching method | — | 1989-12-05 |