Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8150243 | Heating process apparatus | Akira Kumagai, Masami Shibagaki, Akihiro Egami | 2012-04-03 |
| 7807553 | Substrate heating apparatus and semiconductor fabrication method | Masami Shibagaki, Akihiro Egami, Akira Kumagai, Susumu Akiyama | 2010-10-05 |
| 5304405 | Thin film deposition method and apparatus | Masahiko Kobayashi | 1994-04-19 |