Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9603195 | Substrate heat treatment apparatus | Masami Shibagaki | 2017-03-21 |
| 9431281 | Temperature control method for substrate heat treatment apparatus, semiconductor device manufacturing method, temperature control program for substrate heat treatment apparatus, and recording medium | Masami Shibagaki | 2016-08-30 |
| 8691676 | Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat treating apparatus, and recording medium | Masami Shibagaki | 2014-04-08 |