Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8147242 | Substrate supporting/transferring tray | Masami Shibagaki | 2012-04-03 |
| 8092139 | Inline-type wafer conveyance device | Naoki Watanabe, Einstein Noel Abarra, David Djulianto Djayaprawira | 2012-01-10 |
| 8016537 | Inline-type wafer conveyance device | Naoki Watanabe, Einstein Noel Abarra, David Djulianto Djayaprawira | 2011-09-13 |
| 7780440 | Substrate supporting/transferring tray | Masami Shibagaki | 2010-08-24 |
| 7732739 | Substrate heat treatment apparatus and substrate transfer tray used in substrate heat treatment | Masami Shibagaki | 2010-06-08 |