Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9147742 | Heat treatment apparatus and semiconductor device manufacturing method | Hiroshi Doi, Masami Shibagaki | 2015-09-29 |
| 8426323 | Substrate processing apparatus, substrate annealing method, and semiconductor device manufacturing method | Nobuyuki Masaki, Masami Shibagaki, Hiroshi Doi | 2013-04-23 |
| 8129663 | Vacuum heating apparatus | Nobuyuki Masaki, Masami Shibagaki, Hiroshi Doi | 2012-03-06 |