Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699570 | System and method for hi-precision ion implantation | Supakit Charnvanichborikarn, Wei Zou, Hans-Joachim L. Gossmann, Qintao Zhang, William R. Bogiages, Jr. +1 more | 2023-07-11 |
| 10937646 | Method for isolating gates in transistors | — | 2021-03-02 |
| 9783884 | Method for implementing low dose implant in a plasma system | Ilwoong Koo, Jun Seok Lee | 2017-10-10 |
| 9036470 | System and method for virtual private application networks | Mohnish Anumala, Jeyasubramanian Irungolapillai | 2015-05-19 |
| 8932430 | RF coupled plasma abatement system comprising an integrated power oscillator | William F. DiVergilio | 2015-01-13 |
| 8906195 | Tuning hardware for plasma ashing apparatus and methods of use thereof | Robert P. Couilliard | 2014-12-09 |
| 8580076 | Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith | Alan F. Becknell, Thomas Buckley, David Ferris, Richard E. Pingree, Jr., Palanikumaran Sakthivel +1 more | 2013-11-12 |
| 8320257 | Automatic testing of scheduled telepresence meetings | John Monaghan | 2012-11-27 |
| 8268181 | Plasma ashing apparatus and endpoint detection process | Palanikumaran Sakthivel, Thomas Buckley | 2012-09-18 |
| 7892357 | Gas distribution plate assembly for plasma reactors | — | 2011-02-22 |
| 7845310 | Wide area radio frequency plasma apparatus for processing multiple substrates | William F. DiVergilio | 2010-12-07 |
| 7037846 | Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing | Herbert H. Sawin, Palanikumaran Sakthievel | 2006-05-02 |
| 6796711 | Contact temperature probe and process | Michael B. Colson | 2004-09-28 |
| 6761796 | Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing | Herbert H. Sawin, Palanikumaran Sakthievel | 2004-07-13 |
| 6225745 | Dual plasma source for plasma process chamber | — | 2001-05-01 |
| 6057645 | Plasma discharge device with dynamic tuning by a movable microwave trap | Richard E. Pingree, Jr., Victor PELLICIER | 2000-05-02 |
| 6031320 | Device for cooling electrodeless lamp with supersonic outlet jets and a staggered manifold | Mohammad Kamarehi, Robert D. Wooten | 2000-02-29 |