Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783884 | Method for implementing low dose implant in a plasma system | Jun Seok Lee, Aseem K. Srivastava | 2017-10-10 |
| 9142438 | Techniques for clamping and declamping a substrate | Sung-Hwan Hyun | 2015-09-22 |