Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990520 | Method of manufacturing a semiconductor device having frame structures laterally surrounding backside metal structures | Andre Brockmeier, Ronny Kern, Michael Knabl, Matteo Piccin, Francisco Javier Santos Rodriguez | 2024-05-21 |
| 11211459 | Semiconductor device and method of manufacturing a semiconductor device | Andre Brockmeier, Ronny Kern, Michael Knabl, Matteo Piccin, Francisco Javier Santos Rodriguez | 2021-12-28 |
| 11107732 | Methods for processing a wide band gap semiconductor wafer, methods for forming a plurality of thin wide band gap semiconductor wafers, and wide band gap semiconductor wafers | Francisco Javier Santos Rodriguez, Tobias Franz Wolfgang Hoechbauer, Martin Huber, Wolfgang Lehnert, Roland Rupp +1 more | 2021-08-31 |
| 10903078 | Methods for processing a silicon carbide wafer, and a silicon carbide semiconductor device | Hans-Joachim Schulze, Alexander Breymesser, Mihai Draghici, Bernhard Goller, Tobias Franz Wolfgang Hoechbauer +3 more | 2021-01-26 |
| 10710874 | Micromechanical structure and method for manufacturing the same | Tobias Frischmuth, Thomas Grille, Ursula Hedenig, Markus Kahn, Daniel Maurer +2 more | 2020-07-14 |
| 10106398 | Micromechanical structure comprising carbon material and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer +3 more | 2018-10-23 |
| 9741618 | Methods of forming semiconductor devices | Gudrun Stranzl, Martin Zgaga, Markus Kahn | 2017-08-22 |
| 9530678 | Substrate carrier system for moving substrates in a vertical oven and method for processing substrates | Andreas Stefaner, Heimo Schieder, Roland Moennich, Anton Winkler | 2016-12-27 |
| 9511560 | Processing a sacrificial material during manufacture of a microfabricated product | Daniel Maurer, Thomas Grille, Joachim Hirschler, Markus Kahn | 2016-12-06 |
| 9515162 | Surface treatment of semiconductor substrate using free radical state fluorine particles | Maria Reiner, Clemens Ostermaier, Peter Lagger, Gerhard Prechtl, Oliver Haeberlen +2 more | 2016-12-06 |
| 9257342 | Methods of singulating substrates to form semiconductor devices using dummy material | Gudrun Stranzl, Martin Zgaga, Markus Kahn | 2016-02-09 |
| 9212045 | Micro mechanical structure and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer +2 more | 2015-12-15 |
| 8748297 | Methods of forming semiconductor devices by singulating a substrate by removing a dummy fill material | Gudrun Stranzl, Martin Zgaga, Markus Kahn | 2014-06-10 |