Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11787686 | Method for processing a layer structure and microelectromechanical component | Andre Brockmeier, Wolfgang Friza | 2023-10-17 |
| 11616032 | Semiconductor device having alignment pads and method of manufacturing the same | Christof Altstaetter, Thomas Beyreder, Oliver Blank, Jürgen Bostjancic, Andreas Kleinbichler +2 more | 2023-03-28 |
| 11180362 | Method for processing a layer structure and microelectromechanical component | Andre Brockmeier, Wolfgang Friza | 2021-11-23 |
| 10766766 | Method for processing a layer structure and microelectromechanical component | Andre Brockmeier, Wolfgang Friza | 2020-09-08 |
| 10710874 | Micromechanical structure and method for manufacturing the same | Tobias Frischmuth, Guenter Denifl, Thomas Grille, Ursula Hedenig, Markus Kahn +2 more | 2020-07-14 |
| 10106398 | Micromechanical structure comprising carbon material and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Ursula Hedenig +3 more | 2018-10-23 |
| 10081533 | Micromechanical structure and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Ursula Hedenig +2 more | 2018-09-25 |
| 9511560 | Processing a sacrificial material during manufacture of a microfabricated product | Guenter Denifl, Thomas Grille, Joachim Hirschler, Markus Kahn | 2016-12-06 |
| 9439017 | Method for manufacturing a plurality of microphone structures, microphone and mobile device | Ursula Hedenig, Thomas Grille, Peter Irsigler, Soenke Pirk, Andre Brockmeier | 2016-09-06 |
| 9212045 | Micro mechanical structure and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Ursula Hedenig +2 more | 2015-12-15 |
| 8871550 | Method for processing a wafer at unmasked areas and previously masked areas to reduce a wafer thickness | Thomas Grille, Ursula Hedenig, Martin Zgaga | 2014-10-28 |
| 8125129 | Working electrode for an electrodynamic fragmenting installation | Reinhard Müller-Siebert | 2012-02-28 |
| 8071876 | Method for grounding a high voltage electrode | Christoph Anliker, Reinhard Müller-Siebert | 2011-12-06 |
| 5213183 | Control device for a valve with a spiral spring | — | 1993-05-25 |