Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10710874 | Micromechanical structure and method for manufacturing the same | Tobias Frischmuth, Guenter Denifl, Thomas Grille, Markus Kahn, Daniel Maurer +2 more | 2020-07-14 |
| 10516943 | Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device | Manuel Dorfmeister, Michael Schneider, Manfred Kaltenbacher, Alfons Dehe, Thomas Grille +1 more | 2019-12-24 |
| 10461203 | Semiconductor devices, a fluid sensor and a method for forming a semiconductor device | Stefan Clara, Thomas Grille, Peter Irsigler, Bernhard Jakoby, Ventsislav Lavchiev +2 more | 2019-10-29 |
| 10345227 | Sensing systems and methods using a coupling structure | Ventsislav Lavchiev, Thomas Grille, Bernhard Jakoby | 2019-07-09 |
| 10247671 | Photonic crystal sensor structure and a method for manufacturing the same | Jonathan Silvano de Sousa, Thomas Grille, Thomas Neidhart, Peter Irsigler, Vijaye Kumar Rajaraman | 2019-04-02 |
| 10217644 | Production of adhesion structures in dielectric layers using photoprocess technology and devices incorporating adhesion structures | Thomas Grille, Joern Plagmann, Helmut Schoenherr, Ralph Muth | 2019-02-26 |
| 10106398 | Micromechanical structure comprising carbon material and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer +3 more | 2018-10-23 |
| 10081533 | Micromechanical structure and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer +2 more | 2018-09-25 |
| 10005659 | Method for simultaneous structuring and chip singulation | Thomas Grille, Michael Roesner, Gudrun Stranzl, Martin Zgaga | 2018-06-26 |
| 9939331 | System and method for a capacitive thermometer | Jonathan Silvano de Sousa, Tobias Frischmuth, Peter Irsigler, Ulrich Schmid, Thomas Grille +1 more | 2018-04-10 |
| 9941432 | Semiconductor devices, a fluid sensor and a method for forming a semiconductor device | Stefan Clara, Thomas Grille, Peter Irsigler, Bernhard Jakoby, Ventsislav Lavchiev +2 more | 2018-04-10 |
| 9903816 | Photonic crystal sensor structure and a method for manufacturing the same | Jonathan Silvano de Sousa, Thomas Grille, Thomas Neidhart, Peter Irsigler, Vijaye Kumar Rajaraman | 2018-02-27 |
| 9748140 | Method of manufacturing semiconductor devices | Markus Ottowitz, Thomas Grille, Carsten von Koblinski | 2017-08-29 |
| 9702813 | Sensing systems and methods using a coupling structure | Ventsislav Lavchiev, Thomas Grille, Bernhard Jakoby | 2017-07-11 |
| 9618693 | Liquid sensing systems and methods using a ring resonator sensor | Ventsislav Lavchiev, Bernhard Jakoby, Thomas Grille, Peter Irsigler, Thomas Neidhart +1 more | 2017-04-11 |
| 9610543 | Method for simultaneous structuring and chip singulation | Thomas Grille, Michael Roesner, Gudrun Stranzl, Martin Zgaga | 2017-04-04 |
| 9439017 | Method for manufacturing a plurality of microphone structures, microphone and mobile device | Daniel Maurer, Thomas Grille, Peter Irsigler, Soenke Pirk, Andre Brockmeier | 2016-09-06 |
| 9417186 | Opto-electronic sensor | Bernhard Jakoby, Ventsislav Lachiev, Thomas Grille, Peter Irsigler, Sokratis Sgouridis +1 more | 2016-08-16 |
| 9212045 | Micro mechanical structure and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer +2 more | 2015-12-15 |
| 8871550 | Method for processing a wafer at unmasked areas and previously masked areas to reduce a wafer thickness | Thomas Grille, Martin Zgaga, Daniel Maurer | 2014-10-28 |