Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11787686 | Method for processing a layer structure and microelectromechanical component | Andre Brockmeier, Daniel Maurer | 2023-10-17 |
| 11414320 | Methods for producing thin-film layers and microsystems having thin-film layers | Alfred Sigl, Stefan Geissler | 2022-08-16 |
| 11223904 | Method for manufacturing an opening structure and opening structure | — | 2022-01-11 |
| 11180362 | Method for processing a layer structure and microelectromechanical component | Andre Brockmeier, Daniel Maurer | 2021-11-23 |
| 10889492 | Methods for producing thin-film layers and microsystems having thin-film layers | Alfred Sigl, Stefan Geissler | 2021-01-12 |
| 10766766 | Method for processing a layer structure and microelectromechanical component | Andre Brockmeier, Daniel Maurer | 2020-09-08 |
| 10469948 | Method for manufacturing an opening structure and opening structure | — | 2019-11-05 |
| 10464807 | Semiconductor device, microphone and method for producing a semiconductor device | Stefan Barzen, Marc Fueldner | 2019-11-05 |
| 10405099 | MEMS device and method for producing a MEMS device | Stefan Jost, Stefan Geissler, Soenke Pirk | 2019-09-03 |
| 10405118 | Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof | Alfons Dehe, Stefan Barzen, Wolfgang Klein | 2019-09-03 |
| 9902612 | Method for forming a microelectromechanical device | Alfons Dehe, Stefan Barzen, Ulrich Krumbein, Wolfgang Klein | 2018-02-27 |
| 9745188 | Microelectromechanical device and method for forming a microelectromechanical device | Alfons Dehe, Stefan Barzen, Ulrich Krumbein, Wolfgang Klein | 2017-08-29 |
| 9565488 | Micro-electro-mechanical system devices | Alfons Dehe | 2017-02-07 |
| 9503823 | Capacitive microphone with insulated conductive plate | Stefan Barzen, Andre Brockmeier, Marc Fueldner, Stephan Pindl | 2016-11-22 |
| 9458009 | Semiconductor devices and methods of forming thereof | Alfons Dehe, Carsten Ahrens, Stefan Barzen | 2016-10-04 |
| 9363609 | Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same | Thomas Grille, Klaus Muemmler, Guenter Ziegler, Carsten Ahrens | 2016-06-07 |
| 9102519 | Semiconductor devices and methods of forming thereof | Alfons Dehe, Carsten Ahrens, Stefan Barzen | 2015-08-11 |
| 9002037 | MEMS structure with adjustable ventilation openings | Alfons Dehe, Matthias Herrmann, Ulrich Krumbein, Stefan Barzen, Wolfgang Klein +1 more | 2015-04-07 |
| 8975107 | Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions | Alfons Dehe, Stefan Barzen, Wolfgang Klein | 2015-03-10 |
| 8575037 | Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same | Thomas Grille, Klaus Muemmler, Guenter Zieger, Carsten Ahrens | 2013-11-05 |
| 8461655 | Micromechanical sound transducer having a membrane support with tapered surface | Wolfgang Klein, Uwe Seidel, Stefan Barzen, Mohsin Nawaz, Xu Kang Cheng +1 more | 2013-06-11 |
| 6649459 | Method for manufacturing a semiconductor component | Gerald Deboy, Oliver Häberlen, Michael Rüb, Helmut Strack | 2003-11-18 |