Issued Patents All Time
Showing 1–25 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297102 | Membrane support for dual backplate transducers | Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geißler, Matthias Herrmann +4 more | 2025-05-13 |
| 12196589 | Thermoresistive micro sensor device | Martin Seidl, Christian Bretthauer, Ulrich Krumbein, David Tumpold | 2025-01-14 |
| 11905167 | Dual membrane transducer | Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Herrmann +4 more | 2024-02-20 |
| 11835041 | Thin MEMS pump with membrane and valve lip structure | Martin Seidl, Alfons Dehe, Daniel Fruechtl, Ulrich Krumbein, Johann Strasser +1 more | 2023-12-05 |
| 11788990 | Photoacoustic sensor valve | Johannes Manz, David Tumpold | 2023-10-17 |
| 11524891 | Membrane support for dual backplate transducers | Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Herrmann +4 more | 2022-12-13 |
| 11470426 | MEMS devices | Arnaud Walther, Stefan Barzen, Johann Strasser | 2022-10-11 |
| 11275057 | Photoacoustic sensor valve | Johannes Manz, David Tumpold | 2022-03-15 |
| 11212624 | MEMS-transducer and method for producing a MEMS-transducer | Karolina Gierl, Markus Meyer | 2021-12-28 |
| 10981780 | Membrane support for dual backplate transducers | Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Herrmann +4 more | 2021-04-20 |
| 10638236 | MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducer | — | 2020-04-28 |
| 10562741 | Method for modernizing an escalator or a moving walkway | Christoph Eder, Eva Karall, Jürg Burri, Michael Matheisl, Walter Thierer +1 more | 2020-02-18 |
| 10536760 | Microelectromechanical system | — | 2020-01-14 |
| 10506345 | System and method for a microphone | Reinhard Gabl | 2019-12-10 |
| 10405118 | Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof | Alfons Dehe, Stefan Barzen, Wolfgang Friza | 2019-09-03 |
| 9902612 | Method for forming a microelectromechanical device | Alfons Dehe, Stefan Barzen, Ulrich Krumbein, Wolfgang Friza | 2018-02-27 |
| 9809444 | System and method for a differential comb drive MEMS | — | 2017-11-07 |
| 9745188 | Microelectromechanical device and method for forming a microelectromechanical device | Alfons Dehe, Stefan Barzen, Ulrich Krumbein, Wolfgang Friza | 2017-08-29 |
| 9736590 | System and method for a microphone | Reinhard Gabl | 2017-08-15 |
| 9611135 | System and method for a differential comb drive MEMS | — | 2017-04-04 |
| 9540226 | System and method for a MEMS transducer | Martin Wurzer, Stefan Barzen, Alfons Dehe | 2017-01-10 |
| 9373700 | Field plate trench transistor and method for producing it | Franz Hirler, Walter Rieger, Thorsten Meyer, Frank Pfirsch | 2016-06-21 |
| 9180758 | Film for separating a wet area from a dry area of a door box of a vehicle door | — | 2015-11-10 |
| 9171841 | Field plate trench transistor and method for producing it | Franz Hirler, Walter Rieger, Thorsten Meyer, Frank Pfirsch | 2015-10-27 |
| 9002037 | MEMS structure with adjustable ventilation openings | Alfons Dehe, Matthias Herrmann, Ulrich Krumbein, Stefan Barzen, Wolfgang Friza +1 more | 2015-04-07 |