Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297102 | Membrane support for dual backplate transducers | Wolfgang Klein, Evangelos Angelopoulos, Marc Fueldner, Stefan Geißler, Matthias Herrmann +4 more | 2025-05-13 |
| 11905167 | Dual membrane transducer | Wolfgang Klein, Evangelos Angelopoulos, Marc Fueldner, Stefan Geissler, Matthias Herrmann +4 more | 2024-02-20 |
| 11668683 | Thermal emitter with embedded heating element | Christoph Glacer, Matthias Reinwald | 2023-06-06 |
| 11524891 | Membrane support for dual backplate transducers | Wolfgang Klein, Evangelos Angelopoulos, Marc Fueldner, Stefan Geissler, Matthias Herrmann +4 more | 2022-12-13 |
| 11505453 | Sensor with a membrane electrode, a counterelectrode, and at least one spring | — | 2022-11-22 |
| 11470426 | MEMS devices | Arnaud Walther, Wolfgang Klein, Johann Strasser | 2022-10-11 |
| 11115755 | Sound transducer structure and method for manufacturing a sound transducer structure | Alfons Dehe, Marc Fueldner | 2021-09-07 |
| 11053117 | MEMS component and production method for a MEMS component | Marc Fueldner, Alfons Dehe, Gunar Lorenz | 2021-07-06 |
| 11039248 | System and method for a pumping speaker | — | 2021-06-15 |
| 10981780 | Membrane support for dual backplate transducers | Wolfgang Klein, Evangelos Angelopoulos, Marc Fueldner, Stefan Geissler, Matthias Herrmann +4 more | 2021-04-20 |
| 10779101 | MEMS device | Alfons Dehe | 2020-09-15 |
| 10689250 | MEMS component and production method for a MEMS component | Marc Fueldner, Alfons Dehe, Gunar Lorenz | 2020-06-23 |
| 10602290 | MEMS device | Alfons Dehe | 2020-03-24 |
| 10567886 | Sound transducer structure and method for manufacturing a sound transducer structure | Alfons Dehe, Marc Fueldner | 2020-02-18 |
| 10464807 | Semiconductor device, microphone and method for producing a semiconductor device | Wolfgang Friza, Marc Fueldner | 2019-11-05 |
| 10469958 | MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducer | — | 2019-11-05 |
| 10462579 | System and method for a multi-electrode MEMS device | — | 2019-10-29 |
| 10405118 | Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof | Alfons Dehe, Wolfgang Friza, Wolfgang Klein | 2019-09-03 |
| 10244316 | System and method for a pumping speaker | — | 2019-03-26 |
| 10171925 | MEMS device | Alfons Dehe | 2019-01-01 |
| 10034100 | Sound transducer structure and method for manufacturing a sound transducer structure | Alfons Dehe, Marc Fueldner | 2018-07-24 |
| 10003889 | System and method for a multi-electrode MEMS device | — | 2018-06-19 |
| 9902612 | Method for forming a microelectromechanical device | Alfons Dehe, Ulrich Krumbein, Wolfgang Friza, Wolfgang Klein | 2018-02-27 |
| 9875934 | Semiconductor device and a method for forming a semiconductor device | — | 2018-01-23 |
| 9843862 | System and method for a pumping speaker | — | 2017-12-12 |