Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9745188 | Microelectromechanical device and method for forming a microelectromechanical device | Alfons Dehe, Ulrich Krumbein, Wolfgang Friza, Wolfgang Klein | 2017-08-29 |
| 9673785 | Packaged MEMS device comprising adjustable ventilation opening | Christian Herzum, Martin Wurzer, Roland Helm, Michael Kropfitsch | 2017-06-06 |
| 9668056 | Sound transducer structure and method for manufacturing a sound transducer structure | Alfons Dehe, Marc Fueldner | 2017-05-30 |
| 9628886 | MEMS device | Alfons Dehe | 2017-04-18 |
| 9540226 | System and method for a MEMS transducer | Wolfgang Klein, Martin Wurzer, Alfons Dehe | 2017-01-10 |
| 9503823 | Capacitive microphone with insulated conductive plate | Andre Brockmeier, Marc Fueldner, Stephan Pindl, Wolfgang Friza | 2016-11-22 |
| 9458009 | Semiconductor devices and methods of forming thereof | Alfons Dehe, Carsten Ahrens, Wolfgang Friza | 2016-10-04 |
| 9210516 | Packaged MEMS device and method of calibrating a packaged MEMS device | Christian Herzum, Martin Wurzer, Roland Helm, Michael Kropfitsch | 2015-12-08 |
| 9179221 | MEMS devices, interface circuits, and methods of making thereof | Andreas Wiesbauer, Christian Jenkner, Marc Fueldner | 2015-11-03 |
| 9102519 | Semiconductor devices and methods of forming thereof | Alfons Dehe, Carsten Ahrens, Wolfgang Friza | 2015-08-11 |
| 9002037 | MEMS structure with adjustable ventilation openings | Alfons Dehe, Matthias Herrmann, Ulrich Krumbein, Wolfgang Klein, Wolfgang Friza +1 more | 2015-04-07 |
| 8975107 | Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions | Alfons Dehe, Wolfgang Friza, Wolfgang Klein | 2015-03-10 |
| 8723277 | Tunable MEMS device and method of making a tunable MEMS device | Alfons Dehe, Martin Wurzer, Christian Herzum, Wolfgang Klein | 2014-05-13 |
| 8542853 | Sound transducer structure and method for manufacturing a sound transducer structure | Alfons Dehe, Marc Fueldner | 2013-09-24 |
| 8461655 | Micromechanical sound transducer having a membrane support with tapered surface | Wolfgang Klein, Uwe Seidel, Mohsin Nawaz, Wolfgang Friza, Xu Kang Cheng +1 more | 2013-06-11 |
| 7912236 | Sound transducer structure and method for manufacturing a sound transducer structure | Alfons Dehe, Marc Fueldner | 2011-03-22 |
| 7882612 | Method for producing a membrane | Alfons Dehe, Marc Fueldner | 2011-02-08 |
| 7502482 | Membrane and method for the production of the same | Alfons Dehe, Marc Fueldner | 2009-03-10 |
| 7348646 | Micromechanical capacitive transducer and method for manufacturing the same | Alfons Dehe, Marc Fueldner | 2008-03-25 |
| 7253016 | Micromechanical capacitive transducer and method for producing the same | Alfons Dehe, Marc Füldner | 2007-08-07 |
| 7001828 | Method and apparatus for manufacturing a device having a moveable structure | Alfons Dehe | 2006-02-21 |