Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11528545 | Single-ended readout of a differential MEMS device | Wilfried Florian, Niccoló De Milleri, Philipp Greiner, Andreas Wiesbauer, Bert Zinserling | 2022-12-13 |
| 9673785 | Packaged MEMS device comprising adjustable ventilation opening | Christian Herzum, Roland Helm, Michael Kropfitsch, Stefan Barzen | 2017-06-06 |
| 9591408 | Adjustable ventilation openings in MEMS structures | Alfons Dehe | 2017-03-07 |
| 9580299 | MEMS device and method of making a MEMS device | Alfons Dehe, Christian Herzum | 2017-02-28 |
| 9540226 | System and method for a MEMS transducer | Wolfgang Klein, Stefan Barzen, Alfons Dehe | 2017-01-10 |
| 9409763 | MEMS device and method of making a MEMS device | Alfons Dehe, Christian Herzum | 2016-08-09 |
| 9210516 | Packaged MEMS device and method of calibrating a packaged MEMS device | Christian Herzum, Roland Helm, Michael Kropfitsch, Stefan Barzen | 2015-12-08 |
| 9002037 | MEMS structure with adjustable ventilation openings | Alfons Dehe, Matthias Herrmann, Ulrich Krumbein, Stefan Barzen, Wolfgang Klein +1 more | 2015-04-07 |
| 8983097 | Adjustable ventilation openings in MEMS structures | Alfons Dehe | 2015-03-17 |
| 8723277 | Tunable MEMS device and method of making a tunable MEMS device | Alfons Dehe, Christian Herzum, Wolfgang Klein, Stefan Barzen | 2014-05-13 |
| 8428286 | MEMS microphone packaging and MEMS microphone module | Marc Fueldner, Alfons Dehe | 2013-04-23 |