Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11691871 | Microelectromechanical system (MEMS) vibration sensor having a segmented backplate | Somu Goswami, Christian Bretthauer, Matthias Herrmann | 2023-07-04 |
| 11693021 | Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor | Somu Goswami, Christian Bretthauer, Matthias Herrmann, Pradyumna Mishra, Daniel Neumaier +1 more | 2023-07-04 |
| 11117798 | MEMS-sensor | Alfons Dehe, Marc Fueldner, Bernd Goller, Ulrich Krumbein, Andreas Wiesbauer | 2021-09-14 |
| 11053117 | MEMS component and production method for a MEMS component | Marc Fueldner, Stefan Barzen, Alfons Dehe | 2021-07-06 |
| 10689250 | MEMS component and production method for a MEMS component | Marc Fueldner, Stefan Barzen, Alfons Dehe | 2020-06-23 |
| 10570007 | MEMS assembly and method for producing a MEMS assembly | Bernd Goller | 2020-02-25 |
| 10214413 | Micro-electro-mechanical system sensor devices | Nikolay Ilkov, Georg Lischka | 2019-02-26 |
| 9015016 | System and method for three-dimensional schematic capture and result visualization of multi-physics system models | Mattan Kamon | 2015-04-21 |
| 7272801 | System and method for process-flexible MEMS design and simulation | Mattan Kamon, Stephen R. Breit | 2007-09-18 |
| 7263674 | System and method for three-dimensional visualization and postprocessing of a system model | — | 2007-08-28 |
| 7131105 | System and method for automatic mesh generation from a system-level MEMS design | Christopher Kennedy | 2006-10-31 |
| 6553833 | Device for bias potential generation for an oscillating rotation speed sensor | Karsten Funk, Reinhard Neul | 2003-04-29 |