Issued Patents All Time
Showing 76–100 of 286 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7648819 | Method and apparatus for cleaning a semiconductor substrate in an immersion lithography system | Steven J. Holmes, Mark C. Hakey, David V. Horak | 2010-01-19 |
| 7646469 | Immersion optical lithography system having protective optical coating | Steven J. Holmes, Charles W. Koburger, III, Naim Moumen | 2010-01-12 |
| 7645676 | Semiconductor structures for latch-up suppression and methods of forming such semiconductor structures | Robert J. Gauthier, Jr., David V. Horak, Charles W. Koburger, III, Jack A. Mandelman, William R. Tonti | 2010-01-12 |
| 7629192 | Passive electrically testable acceleration and voltage measurement devices | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Leah Pastel | 2009-12-08 |
| 7607455 | Micro-electro-mechanical valves and pumps and methods of fabricating same | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-10-27 |
| 7601205 | Carbon nanotubes as low voltage field emission sources for particle precipitators | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-10-13 |
| 7585614 | Sub-lithographic imaging techniques and processes | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell +2 more | 2009-09-08 |
| 7579272 | Methods of forming low-k dielectric layers containing carbon nanostructures | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-08-25 |
| 7566613 | Method of forming a dual gated FinFET gain cell | Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Mark E. Masters, Peter H. Mitchell | 2009-07-28 |
| 7560347 | Methods for forming a wrap-around gate field effect transistor | Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell | 2009-07-14 |
| 7557023 | Implantation of gate regions in semiconductor device fabrication | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-07-07 |
| 7535016 | Vertical carbon nanotube transistor integration | Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Mark E. Masters, Peter H. Mitchell | 2009-05-19 |
| 7528494 | Accessible chip stack and process of manufacturing thereof | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-05-05 |
| 7521808 | Wiring paterns formed by selective metal plating | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-04-21 |
| 7521776 | Soft error reduction of CMOS circuits on substrates with hybrid crystal orientation using buried recombination centers | Ethan H. Cannon, Charles W. Koburger, III, Jack A. Mandelman, William R. Tonti | 2009-04-21 |
| 7521735 | Multiple layer and crystal plane orientation semiconductor substrate | David V. Horak, Charles W. Koburger, III, Leathen Shi | 2009-04-21 |
| 7517716 | Method of forming optical sensor that includes three pairs of electrodes formed at different depths in a semiconductor substrate | Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-04-14 |
| 7510939 | Microelectronic structure by selective deposition | Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-03-31 |
| 7505110 | Micro-electro-mechanical valves and pumps | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-03-17 |
| 7504314 | Method for fabricating oxygen-implanted silicon on insulation type semiconductor and semiconductor formed therefrom | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Larry Nesbit | 2009-03-17 |
| 7495743 | Immersion optical lithography system having protective optical coating | Steven J. Holmes, Charles W. Koburger, III, Naim Moumen | 2009-02-24 |
| 7492046 | Electric fuses using CNTs (carbon nanotubes) | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-02-17 |
| 7491964 | Nitridation of STI fill oxide to prevent the loss of STI fill oxide during manufacturing process | Fred Buehrer, Anthony I. Chou, Renee T. Mo | 2009-02-17 |
| 7491631 | Method of doping a gate electrode of a field effect transistor | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-02-17 |
| 7491618 | Methods and semiconductor structures for latch-up suppression using a conductive region | David V. Horak, Charles W. Koburger, III, Jack A. Mandelman, William R. Tonti | 2009-02-17 |