| 10103060 |
Test structures for dielectric reliability evaluations |
David G. Brochu, JR., Baozhen Li, Barry P. Linder, James H. Stathis, Ernest Y. Wu |
2018-10-16 |
| 9851398 |
Via leakage and breakdown testing |
Fen Chen, Charles W. Griffin, Kevin Kolvenbach |
2017-12-26 |
| 9780031 |
Wiring structures |
Fen Chen, Cathryn J. Christiansen, Charles W. Griffin |
2017-10-03 |
| 9453873 |
Non-planar field effect transistor test structure and lateral dielectric breakdown testing method |
Fen Chen, Kevin Kolvenbach, Michael A. Shinosky |
2016-09-27 |
| 9059052 |
Alternating open-ended via chains for testing via formation and dielectric integrity |
Fen Chen, Cathryn J. Christiansen |
2015-06-16 |
| 9029172 |
On-chip poly-to-contact process monitoring and reliability evaluation system and method of use |
Fen Chen, Timothy D. Sullivan, Yanfeng Wang |
2015-05-12 |
| 8917104 |
Analyzing EM performance during IC manufacturing |
Fen Chen, Kai D. Feng, Richard St-Pierre |
2014-12-23 |
| 8890556 |
Real-time on-chip EM performance monitoring |
Fen Chen, Kai D. Feng, Richard St-Pierre |
2014-11-18 |
| 8754655 |
Test structure, method and circuit for simultaneously testing time dependent dielectric breakdown and electromigration or stress migration |
David G. Brochu, JR., Fen Chen, Travis S. Merrill, Michael A. Shinosky |
2014-06-17 |
| 6743655 |
Negative differential resistance reoxidized nitride silicon-based photodiode and method |
Fen Chen, Baozhen Li, Alvin W. Strong |
2004-06-01 |
| 6445021 |
Negative differential resistance reoxidized nitride silicon-based photodiode and method |
Fen Chen, Baozhen Li, Alvin W. Strong |
2002-09-03 |
| 5898706 |
Structure and method for reliability stressing of dielectrics |
Charles W. Griffin, Chorng-Lii Hwang, William A. Klaasen, Alvin W. Strong |
1999-04-27 |