Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664161 | Method and structure for salicide trench capacitor plate electrode | Michael P. Chudzik, Jack A. Mandelman, Carl Radens, Rajarao Jammy, Padraic Shafer +1 more | 2003-12-16 |
| 6565666 | Capillary dry process and apparatus | Russell H. Arndt, Glenn W. Gale, Frederick William Kern, Jr., William A. Syverson | 2003-05-20 |
| 6555430 | Process flow for capacitance enhancement in a DRAM trench | Michael P. Chudzik, Johnathan E. Faltermeier, Rajarao Jammy, Stephan Kudelka, Irene McStay +1 more | 2003-04-29 |
| 6508014 | Method of drying substrates | Russell H. Arndt, Glenn W. Gale, James Hannah | 2003-01-21 |