Issued Patents All Time
Showing 26–50 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6136664 | Filling of high aspect ratio trench isolation | Laertis Economikos, Jack A. Mandelman | 2000-10-24 |
| 6131258 | Sidewall capacitor with L-shaped dielectric | Katherine L. Saenger, James H. Comfort, Alfred Grill | 2000-10-17 |
| 6124199 | Method for simultaneously forming a storage-capacitor electrode and interconnect | Jeffrey P. Gambino, Gary B. Bronner, Carl Radens | 2000-09-26 |
| 6054328 | Method for cleaning the surface of a dielectric | Peter Richard Duncombe, Robert Benjamin Laibowitz, Wesley C. Natzle, Chienfan Yu | 2000-04-25 |
| 6027966 | Isolated sidewall capacitor | Katherine L. Saenger, James H. Comfort, Alfred Grill | 2000-02-22 |
| 6025226 | Method of forming a capacitor and a capacitor formed using the method | Jeffrey P. Gambino, Mark A. Jaso | 2000-02-15 |
| 6015985 | Deep trench with enhanced sidewall surface area | Herbert L. Ho, Carl Radens | 2000-01-18 |
| 6010748 | Method of delivering source reagent vapor mixtures for chemical vapor deposition using interiorly partitioned injector | Peter C. Van Buskirk, James A. Fair | 2000-01-04 |
| 6002575 | Adherent separator for self-defining discontinuous film | William H. Ma | 1999-12-14 |
| 5998250 | Compound electrode stack capacitor | Panayotis Andricacos, Katherine L. Saenger | 1999-12-07 |
| 5973351 | Semiconductor device with high dielectric constant insulator material | Son V. Nguyen | 1999-10-26 |
| 5955756 | Trench separator for self-defining discontinuous film | William H. Ma | 1999-09-21 |
| 5932907 | Method, materials, and structures for noble metal electrode contacts to silicon | Alfred Grill, Katherine L. Saenger | 1999-08-03 |
| 5914851 | Isolated sidewall capacitor | Katherine L. Saenger, James H. Comfort, Alfred Grill | 1999-06-22 |
| 5879985 | Crown capacitor using a tapered etch of a damascene lower electrode | Jeffrey P. Gambino | 1999-03-09 |
| 5849638 | Deep trench with enhanced sidewall surface area | Herbert L. Ho, Carl Radens | 1998-12-15 |
| 5825609 | Compound electrode stack capacitor | Panayotis Andricacos, Katherine L. Saenger | 1998-10-20 |
| 5796573 | Overhanging separator for self-defining stacked capacitor | William H. Ma | 1998-08-18 |
| 5789320 | Plating of noble metal electrodes for DRAM and FRAM | Panayotis Andricacos, James H. Comfort, Alfred Grill, Vishnubhai V. Patel, Katherine L. Saenger +1 more | 1998-08-04 |
| 5757612 | Structure and fabrication method for non-planar memory elements | Raul E. Acosta, James H. Comfort, Alfred Grill, Katherine L. Saenger | 1998-05-26 |
| 5741363 | Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition | Peter C. Van Buskirk, James A. Fair | 1998-04-21 |
| 5712759 | Sidewall capacitor with L-shaped dielectric | Katherine L. Saenger, James H. Comfort, Alfred Grill | 1998-01-27 |
| 5701647 | Method for making an isolated sidewall capacitor having a compound plate electrode | Katherine L. Saenger | 1997-12-30 |
| 5675471 | Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity | — | 1997-10-07 |
| 5636320 | Sealed chamber with heating lamps provided within transparent tubes | Chienfan Yu, Wesley C. Natzle | 1997-06-03 |