Issued Patents All Time
Showing 51–75 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460270 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-10-08 |
| 6457253 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-10-01 |
| 6446353 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-09-10 |
| 6388382 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Hideyuki Kazumi, Saburou Kanai +3 more | 2002-05-14 |
| D453402 | Vacuum processing equipment configuration | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-02-05 |
| 6336991 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2002-01-08 |
| 6332280 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2001-12-25 |
| 6330756 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2001-12-18 |
| 6330755 | Vacuum processing and operating method | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2001-12-18 |
| 6314658 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2001-11-13 |
| 6301801 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2001-10-16 |
| 6301802 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2001-10-16 |
| 6263588 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2001-07-24 |
| 6221201 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2001-04-24 |
| 6217705 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshitumi Ogawa, Hiroyuki Shichida | 2001-04-17 |
| 6180019 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2001-01-30 |
| 6112431 | Vacuum processing and operating method | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2000-09-05 |
| 6108929 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2000-08-29 |
| 6070341 | Vacuum processing and operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2000-06-06 |
| 6055740 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2000-05-02 |
| 6048434 | Substrate holding system including an electrostatic chuck | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2000-04-11 |
| 6044576 | Vacuum processing and operating method using a vacuum chamber | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2000-04-04 |
| 6012235 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2000-01-11 |
| 5985035 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 1999-11-16 |
| 5961774 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 1999-10-05 |