Issued Patents All Time
Showing 26–50 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645871 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-11-11 |
| 6634116 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-10-21 |
| 6625899 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-09-30 |
| 6610170 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-08-26 |
| 6610171 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-08-26 |
| 6588121 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-07-08 |
| D473354 | Vacuum processing equipment configuration | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-04-15 |
| 6544379 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-04-08 |
| 6524428 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2003-02-25 |
| 6505415 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-01-14 |
| 6499424 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2002-12-31 |
| 6499229 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-12-31 |
| 6490810 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-12-10 |
| 6487794 | Substrate changing-over mechanism in vacuum tank | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-12-03 |
| 6487793 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-12-03 |
| 6487791 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-12-03 |
| 6484415 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-11-26 |
| 6484414 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-11-26 |
| 6481370 | Plasma processsing apparatus | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2002-11-19 |
| 6473989 | Conveying system for a vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-11-05 |
| 6470596 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-10-29 |
| 6467186 | Transferring device for a vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-10-22 |
| 6467187 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-10-22 |
| 6463678 | Substrate changing-over mechanism in a vaccum tank | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-10-15 |
| 6463676 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2002-10-15 |