Issued Patents All Time
Showing 76–95 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5950330 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1999-09-14 |
| 5906684 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 1999-05-25 |
| 5792304 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 1998-08-11 |
| 5784799 | Vacuum processing apparatus for substate wafers | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1998-07-28 |
| 5685684 | Vacuum processing system | Shigekazu Kato, Naoyuki Tamura, Kouji Nishihata, Atsushi Itou, Kenji Nakata +1 more | 1997-11-11 |
| 5673750 | Vacuum processing method and apparatus | Naoyuki Tamura, Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1997-10-07 |
| 5661913 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1997-09-02 |
| 5663884 | Multiprocessing apparatus | Kouji Nishihata, Naoyuki Tamura, Shigekazu Kato, Atsushi Itou | 1997-09-02 |
| 5553396 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1996-09-10 |
| 5457896 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1995-10-17 |
| 5448470 | Multiprocessing apparatus | Kouji Nishihata, Naoyuki Tamura, Shigekazu Kato, Atsushi Itou | 1995-09-05 |
| 5445484 | Vacuum processing system | Shigekazu Kato, Naoyuki Tamura, Kouji Nishihata, Atsushi Itou | 1995-08-29 |
| 5349762 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1994-09-27 |
| 5320982 | Wafer cooling method and apparatus | Naoyuki Tamura, Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1994-06-14 |
| 5314509 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1994-05-24 |
| 5085750 | Plasma treating method and apparatus therefor | Minolu Soraoka, Yoshinao Kawasaki, Katsuyoshi Kudo | 1992-02-04 |
| 5078851 | Low-temperature plasma processor | Kouji Nishihata, Shigekazu Kato, Atsushi Itou, Naoyuki Tamura | 1992-01-07 |
| 4911812 | Plasma treating method and apparatus therefor | Katsuyoshi Kudo, Yoshinao Kawasaki, Minolu Soraoka, Kazunori Tsujimoto, Shinichi Tachi +1 more | 1990-03-27 |
| 4824309 | Vacuum processing unit and apparatus | Yutaka Kakehi, Norio Nakazato, Yoshimasa Fukushima, Fumio Shibata, Norio Kanai | 1989-04-25 |
| 4565601 | Method and apparatus for controlling sample temperature | Yutaka Kakehi, Norio Nakazato, Yoshimasa Fukushima, Kousai Hiratsuka, Fumio Shibata +1 more | 1986-01-21 |