Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D720707 | Reaction tube | Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita +1 more | 2015-01-06 |
| D719114 | Reaction tube | Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita +1 more | 2014-12-09 |
| 8901014 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and non-transitory computer readable recording medium | Yosuke Ota, Yoshiro Hirose, Ryota Sasajima | 2014-12-02 |
| 8895455 | Method for manufacturing semiconductor device and substrate processing apparatus | Yoshiro Hirose | 2014-11-25 |
| 8895457 | Method of manufacturing semiconductor device and substrate processing apparatus | Kotaro Murakami, Yoshiro Hirose, Kenji Kameda | 2014-11-25 |
| D711843 | Reaction tube | Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita +1 more | 2014-08-26 |
| 8809204 | Method of manufacturing semiconductor device and substrate processing apparatus | Yoshiro Hirose, Yushin Takasawa, Yosuke Ota | 2014-08-19 |
| 8673790 | Method of manufacturing a semiconductor device, method of cleaning a process vessel, and substrate processing apparatus | Yoshiro Hirose, Kotaro Murakami | 2014-03-18 |
| 8609551 | Method for manufacturing semiconductor device and substrate processing apparatus | Yoshiro Hirose | 2013-12-17 |
| 8524580 | Manufacturing method of semiconductor substrate and substrate processing apparatus | Yoshiro Hirose, Tomohide Kato | 2013-09-03 |
| 8415258 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Yoshiro Hirose, Yushin Takasawa, Yosuke Ota, Ryota Sasajima | 2013-04-09 |
| 8367557 | Method of forming an insulation film having low impurity concentrations | Yoshiro Hirose, Yushin Takasawa, Yosuke Ota | 2013-02-05 |
| 8252701 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Yosuke Ota, Kojiro Yokozawa | 2012-08-28 |
| 8202809 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yosuke Ota, Yushin Takasawa, Yoshiro Hirose | 2012-06-19 |
| 8076251 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Yoshiro Hirose, Yushin Takasawa, Yosuke Ota, Ryota Sasajima | 2011-12-13 |