Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346026 | Composition for forming underlayer film, resist pattern forming method, and manufacturing method of electronic device | Toshiaki Fukuhara, Takeshi Kawabata | 2025-07-01 |
| 10248019 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film | Shohei Kataoka, Kaoru Iwato, Kana Fujii, Yuichiro Enomoto, Keita Kato +1 more | 2019-04-02 |
| 10126653 | Pattern forming method and resist composition | Kaoru Iwato, Shohei Kataoka, Shinji Tarutani, Keita Kato, Yuichiro Enomoto +3 more | 2018-11-13 |
| 9897922 | Method of forming pattern and developer for use in the method | Yuichiro Enomoto, Shinji Tarutani, Kaoru Iwato, Keita Kato, Kana Fujii | 2018-02-20 |
| 9760003 | Pattern forming method and actinic-ray- or radiation-sensitive resin composition | Kaoru Iwato, Hidenori Takahashi, Shuji Hirano, Keita Kato | 2017-09-12 |
| 9709892 | Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the same | Shohei Kataoka, Kaoru Iwato, Toru Tsuchihashi, Yuichiro Enomoto, Kana Fujii +3 more | 2017-07-18 |
| 9551935 | Pattern forming method and resist composition | Keita Kato, Shinji Tarutani, Toru Tsuchihashi, Yuichiro Enomoto, Kana Fujii +3 more | 2017-01-24 |
| 9513547 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Hidenori Takahashi, Keita Kato | 2016-12-06 |
| 9482958 | Method of forming pattern and developer for use in the method | Yuichiro Enomoto, Shinji Tarutani, Kaoru Iwato, Keita Kato, Kana Fujii | 2016-11-01 |
| 9223219 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film | Yuichiro Enomoto, Shinji Tarutani, Kaoru Iwato, Keita Kato, Akinori Shibuya | 2015-12-29 |
| 9128376 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Keita Kato, Michihiro SHIRAKAWA, Hidenori Takahashi | 2015-09-08 |
| 9116437 | Pattern forming method, chemical amplification resist composition and resist film | Yuichiro Enomoto, Shinji Tarutani | 2015-08-25 |
| 9097973 | Method of forming pattern and developer for use in the method | Yuichiro Enomoto, Shinji Tarutani, Kaoru Iwato, Keita Kato, Kana Fujii | 2015-08-04 |
| 8999621 | Pattern forming method, chemical amplification resist composition and resist film | Yuichiro Enomoto, Shinji Tarutani, Keita Kato, Kaoru Iwato | 2015-04-07 |
| 8871642 | Method of forming pattern and developer for use in the method | Yuichiro Enomoto, Shinji Tarutani, Keita Kato, Kana Fujii | 2014-10-28 |
| 8859192 | Negative pattern forming method and resist pattern | Keita Kato, Kana Fujii, Kaoru Iwato | 2014-10-14 |
| 8808965 | Pattern forming method, pattern, chemical amplification resist composition and resist film | Kaoru Iwato, Shinji Tarutani, Yuichiro Enomoto, Keita Kato | 2014-08-19 |
| 8753802 | Pattern forming method, chemical amplification resist composition and resist film | Keita Kato, Shinji Tarutani, Yuichiro Enomoto, Kaoru Iwato | 2014-06-17 |
| 8709704 | Pattern forming method using developer containing organic solvent and rinsing solution for use in the pattern forming method | Shinji Tarutani | 2014-04-29 |
| 8663907 | Method of forming pattern | Keita Kato, Yuichiro Enomoto, Kaoru Iwato, Shohei Kataoka, Shoichi SAITOH | 2014-03-04 |
| 8507174 | Positive resist composition, pattern forming method using the composition, and compound for use in the composition | Hidenori Takahashi, Kenji Wada | 2013-08-13 |
| 8110333 | Resist composition containing novel sulfonium compound, pattern-forming method using the resist composition, and novel sulfonium compound | Yasutomo Kawanishi, Kenji Wada, Tomotaka Tsuchimura | 2012-02-07 |
| 8092976 | Resist composition and pattern forming method using the same | Kenji Wada | 2012-01-10 |
| 7718344 | Resist composition and pattern forming method using the same | Kenji Wada, Yasutomo Kawanishi | 2010-05-18 |
| 7695892 | Resist composition and pattern-forming method using same | Yushi Kaneko | 2010-04-13 |