Issued Patents All Time
Showing 1–25 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640113 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and method of manufacturing electronic device | Hideaki Tsubaki, Hajime Furutani, Akihiro Kaneko, Wataru Nihashi | 2023-05-02 |
| 11590751 | Lithographic printing plate precursor, method for producing lithographic printing plate, polymer particle, and composition | Atsuyasu NOZAKI | 2023-02-28 |
| 11331900 | Lithographic printing plate precursor and method for producing lithographic printing plate | Ryo Nakamura, Kenjiro ARAKI, Koji Sonokawa, Yuuya MIYAGAWA | 2022-05-17 |
| 11042094 | Treatment liquid and pattern forming method | Hideaki Tsubaki, Toru Tsuchihashi, Wataru Nihashi, Kei Yamamoto | 2021-06-22 |
| 11009791 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device | Takamitsu Tomiga, Kenichi Harada, Shinichi Sugiyama, Fumihiro YOSHINO | 2021-05-18 |
| 10928727 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank including actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing | — | 2021-02-23 |
| 10551739 | Resist composition, and resist film, pattern forming method, and method for manufacturing electronic device, each using resist composition | Akira Takada, Naoya SHIMOJU, Toshiya Takahashi, Hidehiro Mochizuki | 2020-02-04 |
| 10545405 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank including actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device | Shuhei Yamaguchi, Koutarou Takahashi, Toshiaki Fukuhara | 2020-01-28 |
| 10488755 | Pattern forming method, photo mask manufacturing method, and electronic device manufacturing method | Hidehiro Mochizuki, Akira Takada | 2019-11-26 |
| 10444627 | Pattern formation method, active light-sensitive or radiation-sensitive resin composition, resist film, production method for electronic device using same, and electronic device | Hiroo Takizawa, Toru Fujimori, Wataru Nihashi, Natsumi Yokokawa | 2019-10-15 |
| 10423068 | Active-light-sensitive or radiation-sensitive resin composition, active-light-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device | — | 2019-09-24 |
| 10031419 | Pattern forming method, composition kit and resist film, manufacturing method of electronic device using these, and electronic device | Hiroo Takizawa | 2018-07-24 |
| 9766547 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method of manufacturing electronic device using the same, and electronic device | Hiroo Takizawa, Natsumi Yokokawa | 2017-09-19 |
| 9760003 | Pattern forming method and actinic-ray- or radiation-sensitive resin composition | Kaoru Iwato, Hidenori Takahashi, Sou Kamimura, Keita Kato | 2017-09-12 |
| 9651863 | Pattern forming method, active light sensitive or radiation sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Hiroo Takizawa, Natsumi Yokokawa, Wataru Nihashi | 2017-05-16 |
| 9612535 | Pattern forming method, electron beam- or extreme ultraviolet-sensitive resin composition, resist film using the same, method of manufacturing electronic device, and electronic device | Hiroo Takizawa | 2017-04-04 |
| 9551933 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device | Hiroo Takizawa, Natsumi Yokokawa, Wataru Nihashi | 2017-01-24 |
| 9527809 | Compound, actinic ray-sensitive or radiation-sensitive resin composition, resist film, and pattern formation method, and method for manufacturing electronic device using same, and electronic device | Natsumi Yokokawa, Hiroo Takizawa, Wataru Nihashi, Hideaki Tsubaki | 2016-12-27 |
| 9470980 | Pattern-forming method, electron beam-sensitive or extreme ultraviolet radiation-sensitive resin composition, resist film, manufacturing method of electronic device using them and electronic device | Naoki Inoue, Hiroo Takizawa, Hideaki Tsubaki | 2016-10-18 |
| 9423690 | Pattern forming method, electron beam-sensitive or extreme ultraviolet ray-sensitive resin composition, resist film, and method for manufacturing electronic device, and electronic device using the same | Hiroo Takizawa, Natsumi Yokokawa, Wataru Nihashi | 2016-08-23 |
| 9323153 | Actinic ray-sensitive or radiation-sensitive resin composition, and, actinic ray-sensitive or radiation-sensitive film and pattern forming method, each using the same | Hiroo Takizawa, Hideaki Tsubaki | 2016-04-26 |
| 9323150 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern | Hiroo Takizawa, Hideaki Tsubaki | 2016-04-26 |
| 9291897 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device using the same, and electronic device | Natsumi Yokokawa, Hiroo Takizawa, Wataru Nihashi | 2016-03-22 |
| 9291898 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, electronic device and resin | Natsumi Yokokawa, Hiroo Takizawa, Wataru Nihashi | 2016-03-22 |
| 9291896 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, and electronic device | Natsumi Yokokawa, Hiroo Takizawa, Wataru Nihashi | 2016-03-22 |