Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11953829 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Kazunari Yagi, Takashi Kawashima, Tomotaka Tsuchimura, Michihiro SHIRAKAWA | 2024-04-09 |
| 11703758 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Hironori OKA | 2023-07-18 |
| 11656548 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, mask blank with resist film, method for producing photomask, and method for manufacturing electronic device | Tomotaka Tsuchimura, Takashi Kawashima, Akihiro Kaneko, Michihiro Ogawa, Michihiro SHIRAKAWA +1 more | 2023-05-23 |
| 11640113 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and method of manufacturing electronic device | Hideaki Tsubaki, Akihiro Kaneko, Wataru Nihashi, Shuji Hirano | 2023-05-02 |
| 11604414 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Mitsuhiro Fujita, Tomotaka Tsuchimura, Takashi Kawashima, Michihiro Ogawa +3 more | 2023-03-14 |
| 10303058 | Pattern forming method, treating agent, electronic device, and method for manufacturing the same | Michihiro SHIRAKAWA, Akiyoshi GOTO, Masafumi KOJIMA | 2019-05-28 |
| 9523912 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, electronic device and compound | Shohei Kataoka, Akinori Shibuya, Toshiaki Fukuhara, Michihiro SHIRAKAWA | 2016-12-20 |