Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12044967 | Actinic-ray-sensitive or radiation-sensitive resin composition, resist film, pattern formation method, and method for manufacturing electronic device | Daisuke ASAKAWA, Kyohei Sakita, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2024-07-23 |
| 11703758 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Hajime Furutani | 2023-07-18 |
| 11604414 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Hajime Furutani, Mitsuhiro Fujita, Tomotaka Tsuchimura, Takashi Kawashima +3 more | 2023-03-14 |