Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12044967 | Actinic-ray-sensitive or radiation-sensitive resin composition, resist film, pattern formation method, and method for manufacturing electronic device | Daisuke ASAKAWA, Hironori OKA, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2024-07-23 |
| 11656548 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, mask blank with resist film, method for producing photomask, and method for manufacturing electronic device | Tomotaka Tsuchimura, Takashi Kawashima, Akihiro Kaneko, Michihiro Ogawa, Michihiro SHIRAKAWA +1 more | 2023-05-23 |
| 11584810 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, method of manufacturing electronic device, compound, and resin | Akira Takada, Ryo Nishio, Akiyoshi GOTO, Michihiro SHIRAKAWA, Naohiro TANGO +1 more | 2023-02-21 |
| 11156917 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Mitsuhiro Fujita, Takumi Tanaka, Keishi YAMAMOTO, Akiyoshi GOTO, Keita Kato | 2021-10-26 |
| 11073762 | Actinic ray-sensitive or radiation sensitive resin composition, actinic raysensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, and photoacid generator | Daisuke ASAKAWA, Akiyoshi GOTO, Masafumi KOJIMA, Keita Kato, Keiyu OU | 2021-07-27 |
| 11067890 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Akira Takada, Keita Kato | 2021-07-20 |