Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12242192 | Photosensitive resin composition, method for producing the same, resist film, pattern forming method, and method for manufacturing electronic device | Kei Yamamoto, Yasufumi Oishi, Hidenori Takahashi | 2025-03-04 |
| 12235579 | Method for producing actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Keiyu OU, Kei Yamamoto, Kazuhiro Marumo | 2025-02-25 |
| 11584810 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, method of manufacturing electronic device, compound, and resin | Akira Takada, Ryo Nishio, Akiyoshi GOTO, Michihiro SHIRAKAWA, Kazuhiro Marumo +1 more | 2023-02-21 |
| 11579528 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Ryo Nishio, Akira Takada, Akiyoshi GOTO, Kazuhiro Marumo, Keiyu O | 2023-02-14 |
| 11281103 | Composition for forming upper layer film, pattern forming method, resist pattern, and method for manufacturing electronic device | Naoya HATAKEYAMA, Naoki Inoue, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2022-03-22 |
| 11249395 | Pattern forming method, method for manufacturing electronic device, laminate film, and composition for forming upper layer film | Naoki Inoue, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2022-02-15 |
| 10852637 | Pattern forming method, resist pattern, method for manufacturing electronic device, and composition for forming upper layer film | Naoki Inoue, Kei Yamamoto, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2020-12-01 |
| 10578968 | Pattern forming method, resist pattern, and process for producing electronic device | Kei Yamamoto, Naoki Inoue, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2020-03-03 |
| 10175578 | Pattern forming method, composition for forming protective film, method for manufacturing electronic device, and electronic device | Naoki Inoue, Kei Yamamoto, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2019-01-08 |
| 10114292 | Pattern forming method, resist pattern, and method for manufacturing electronic device | Naoki Inoue, Michihiro SHIRAKAWA, Kei Yamamoto, Akiyoshi GOTO | 2018-10-30 |
| 9810981 | Pattern formation method, etching method, electronic device manufacturing method, and electronic device | Ryosuke Ueba, Naoya IGUCHI, Tsukasa Yamanaka, Michihiro SHIRAKAWA, Keita Kato | 2017-11-07 |
| 9454079 | Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern | Akinori Shibuya, Yoko TOKUGAWA, Tomoki Matsuda, Junichi Ito, Shohei Kataoka +4 more | 2016-09-27 |
| 8846290 | Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same | Michihiro SHIRAKAWA, Mitsuhiro Fujita, Shuhei Yamaguchi, Akinori Shibuya, Shohei Kataoka | 2014-09-30 |
| 8846293 | Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the same composition | Yusuke Iizuka, Akinori Shibuya, Shohei Kataoka | 2014-09-30 |
| 8841060 | Actinic-ray-sensitive or radiation-sensitive resin composition, resist film and pattern forming method each using the composition, method for preparing electronic device, and electronic device | Shohei Kataoka, Yusuke Iizuka, Akinori Shibuya, Tomoki Matsuda | 2014-09-23 |