Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235579 | Method for producing actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Keiyu OU, Naohiro TANGO, Kei Yamamoto | 2025-02-25 |
| 12216404 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Masafumi KOJIMA, Minoru Uemura, Takashi Kawashima, Akiyoshi GOTO, Kei Yamamoto +1 more | 2025-02-04 |
| 11584810 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, method of manufacturing electronic device, compound, and resin | Akira Takada, Ryo Nishio, Akiyoshi GOTO, Michihiro SHIRAKAWA, Naohiro TANGO +1 more | 2023-02-21 |
| 11579528 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Ryo Nishio, Akira Takada, Akiyoshi GOTO, Naohiro TANGO, Keiyu O | 2023-02-14 |
| 11029597 | Method for producing pattern laminate, method for producing reversal pattern, and pattern laminate | Yuichiro Goto | 2021-06-08 |
| 5236566 | Vertical type stream plating apparatus | Kiyohide Tsuchiya, Michihiro Shimamura, Katsuaki Nakagawa, Shuji Masuda, Tadashi Ogata | 1993-08-17 |