Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235579 | Method for producing actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Naohiro TANGO, Kei Yamamoto, Kazuhiro Marumo | 2025-02-25 |
| 12216404 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Masafumi KOJIMA, Minoru Uemura, Takashi Kawashima, Akiyoshi GOTO, Kei Yamamoto +1 more | 2025-02-04 |
| 11073762 | Actinic ray-sensitive or radiation sensitive resin composition, actinic raysensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, and photoacid generator | Daisuke ASAKAWA, Akiyoshi GOTO, Masafumi KOJIMA, Keita Kato, Kyohei Sakita | 2021-07-27 |
| 10859914 | Pattern forming method, method for producing electronic device, and actinic ray-sensitive or radiation-sensitive resin composition for organic solvent development | Naoya HATAKEYAMA, Akiyoshi GOTO, Michihiro SHIRAKAWA, Keita Kato | 2020-12-08 |
| 10649329 | Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, and electronic device | Shohei Kataoka, Akinori Shibuya | 2020-05-12 |
| 10025186 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Keita Kato, Michihiro SHIRAKAWA | 2018-07-17 |
| 9952509 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, method for manufacturing electronic device, and electronic device | Keita Kato, Michihiro SHIRAKAWA, Akiyoshi GOTO, Masafumi KOJIMA | 2018-04-24 |
| 9791777 | Active light sensitive or radiation sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Michihiro SHIRAKAWA, Keita Kato | 2017-10-17 |