Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11899361 | Kit, composition for forming underlayer film for imprinting, laminate, and production method using the same | Naoya SHIMOJU, Yuichiro Goto, Akihiro Hakamata | 2024-02-13 |
| 11860538 | Photosensitive resin composition, heterocyclic ring-containing polymer precursor, cured film, laminate, method for producing cured film, and semiconductor device | Takeshi Kawabata, Yu Iwai | 2024-01-02 |
| 11567405 | Photosensitive resin composition, polymer precursor, cured film, laminate, method for producing cured film, and semiconductor device | Takeshi Kawabata, Kenta Yoshida, Yu Iwai | 2023-01-31 |
| 11441053 | Composition for forming adhesive film for imprinting, adhesive film, laminate, method for producing cured product pattern, and method for manufacturing circuit substrate | Naoya SHIMOJU, Yuichiro Goto | 2022-09-13 |
| 11401361 | Curable composition for imprinting, cured product, pattern forming method, lithography method, pattern, mask for lithography, and polymerizable composition for imprinting | Naoya SHIMOJU, Yuichiro Goto | 2022-08-02 |
| 11299653 | Composition, adhesive film, laminate, method for producing cured product pattern, and method for manufacturing circuit substrate | Naoya SHIMOJU, Yuichiro Goto | 2022-04-12 |
| 10780679 | Laminate, method for manufacturing laminate, semiconductor device, and method for manufacturing the semiconductor device | Yu Iwai, Takeshi Kawabata | 2020-09-22 |
| 10649329 | Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, and electronic device | Shohei Kataoka, Keiyu OU | 2020-05-12 |
| 10538627 | Polyimide precursor composition, photosensitive resin composition, cured film, method for producing cured film, a semiconductor device, and method for producing polyimide precursor composition | Takeshi Kawabata, Takuma Amemiya, Hidekazu Oohashi, Yu Iwai | 2020-01-21 |
| 10526448 | Precursor composition, photosensitive resin composition, method for producing precursor composition, cured film, method for producing cured film, and semiconductor device | Yu Iwai, Takeshi Kawabata, Ichiro KOYAMA | 2020-01-07 |
| 10450417 | Resin, composition, cured film, method for manufacturing cured film and semiconductor device | Takeshi Kawabata, Yu Iwai | 2019-10-22 |
| 10234759 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film and method of forming pattern | Takeshi Kawabata, Hiroo Takizawa, Akiyoshi GOTO, Masafumi KOJIMA, Keita Kato | 2019-03-19 |
| 9841679 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Masafumi KOJIMA, Akiyoshi GOTO, Keita Kato, Kei Yamamoto | 2017-12-12 |
| 9551931 | Method of forming pattern, actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, process for manufacturing electronic device and electronic device | Junichi Ito, Akiyoshi GOTO, Michihiro SHIRAKAWA, Kei Yamamoto, Fumihiro YOSHINO | 2017-01-24 |
| 9523912 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, electronic device and compound | Shohei Kataoka, Toshiaki Fukuhara, Hajime Furutani, Michihiro SHIRAKAWA | 2016-12-20 |
| 9454079 | Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern | Yoko TOKUGAWA, Tomoki Matsuda, Junichi Ito, Shohei Kataoka, Toshiaki Fukuhara +4 more | 2016-09-27 |
| 9405197 | Pattern forming method, method for manufacturing electronic device, and electronic device | Shohei Kataoka, Tomoki Matsuda, Toshiaki Fukuhara, Akiyoshi GOTO | 2016-08-02 |
| 9316911 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern using the composition | Tomoki Matsuda, Yoko TOKUGAWA | 2016-04-19 |
| 9291892 | Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the composition | Kaoru Iwato | 2016-03-22 |
| 9250519 | Pattern forming method and actinic ray-sensitive or radiation-sensitive resin composition for use in the method | Shohei Kataoka, Akiyoshi GOTO, Tomoki Matsuda, Toshiaki Fukuhara | 2016-02-02 |
| 9223219 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film | Yuichiro Enomoto, Shinji Tarutani, Sou Kamimura, Kaoru Iwato, Keita Kato | 2015-12-29 |
| 9152049 | Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition | Shohei Kataoka, Shuhei Yamaguchi, Hisamitsu Tomeba | 2015-10-06 |
| 9081277 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern using the composition | Tomoki Matsuda, Yoko TOKUGAWA, Shuhei Yamaguchi, Mitsuhiro Fujita | 2015-07-14 |
| 9046773 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method using the same, polymerizable compound and polymer compound obtained by polymerizing the polymerizable compound | Shuhei Yamaguchi, Yuko Yoshida, Michihiro SHIRAKAWA | 2015-06-02 |
| 9034558 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film and method of forming pattern | Shuhei Yamaguchi, Yusuke Iizuka | 2015-05-19 |