Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9223215 | Actinic ray-sensitive or radiation-sensitive composition, actinic ray-sensitive or radiation-sensitive film using the same, pattern forming method, manufacturing method of electronic device, electronic device and resin | Natsumi Yokokawa, Takeshi Kawabata, Hiroo Takizawa, Hideaki Tsubaki | 2015-12-29 |
| 9188862 | Actinic ray-sensitive or radiation-sensitive resin composition, and, actinic ray-sensitive or radiation-sensitive film and pattern forming method, each using the same | Hiroo Takizawa, Hideaki Tsubaki | 2015-11-17 |
| 9170489 | Pattern-forming method, electron beam-sensitive or extreme ultraviolet radiation-sensitive resin composition, resist film, manufacturing method of electronic device using them and electronic device | Hiroo Takizawa, Hideaki Tsubaki | 2015-10-27 |
| 9090722 | Chemical amplification resist composition, and mold preparation method and resist film using the same | Toru Fujimori, Koji Shirakawa, Toshihiro Usa, Kenji Sugiyama, Takayuki Ito +3 more | 2015-07-28 |
| 9052590 | Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition | Hidenori Takahashi, Takayuki Ito, Hideaki Tsubaki | 2015-06-09 |
| 9005870 | Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition | Hidenori Takahashi, Hideaki Tsubaki | 2015-04-14 |
| 8865389 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern | Hidenori Takahashi, Hideaki Tsubaki | 2014-10-21 |
| 8822129 | Pattern forming method, electron beam-sensitive or extreme ultraviolet-sensitive composition, resist film, manufacturing method of electronic device, and electronic device | Kaoru Iwato, Hideaki Tsubaki | 2014-09-02 |
| 8802349 | Actinic ray-sensitive or radiation-sensitive resin composition and resist film and pattern forming method using the composition | Masahiro Yoshidome, Hiroshi Saegusa, Kaoru Iwato, Yusuke Iizuka | 2014-08-12 |
| 8795944 | Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the composition | Hiroshi Saegusa, Kaoru Iwato, Yusuke Iizuka | 2014-08-05 |
| 8771916 | Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same | Kaoru Iwato, Hiroshi Saegusa, Yusuke Iizuka | 2014-07-08 |
| 8617788 | Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same | Takayuki Kato, Hiroshi Saegusa, Kaoru Iwato, Yusuke Iizuka, Shuhei Yamaguchi +1 more | 2013-12-31 |
| 8603727 | Active light ray sensitive or radioactive ray sensitive resin composition, and active light ray sensitive or radioactive ray sensitive film and pattern forming method using the same | Takeshi Kawabata, Hidenori Takahashi, Tomotaka Tsuchimura, Hideaki Tsubaki | 2013-12-10 |
| 8541161 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same and pattern forming method | Kana Fujii, Shinki Yamada, Toru Fujimori | 2013-09-24 |
| 8362170 | Polymerizable compound and polymer compound obtained by using the same | Kaoru Iwato, Hiroshi Saegusa, Yusuke Iizuka | 2013-01-29 |
| 8349535 | Actinic ray-sensitive or radiation-sensitive resin composition and method of forming pattern therewith | Kana Fujii, Takamitsu Tomiga, Toru Tsuchihashi, Kazuyoshi Mizutani, Jiro Yokoyama +2 more | 2013-01-08 |
| 8252877 | Polymerizable compound and polymer compound obtained by using the same | Kaoru Iwato, Hiroshi Saegusa, Yusuke Iizuka | 2012-08-28 |
| 8182975 | Positive resist composition and pattern forming method using the same | — | 2012-05-22 |
| 8124310 | Positive resist composition and pattern forming method using the same | Shinichi Sugiyama | 2012-02-28 |
| 8043791 | Positive photosensitive composition, pattern forming method using the composition and resin for use in the composition | Yuko Tada, Kazuto Shimada | 2011-10-25 |
| 7989137 | Resist composition and pattern-forming method using the same | Kazuyoshi Mizutani, Shinichi Sugiyama, Jiro Yokoyama | 2011-08-02 |
| 7923196 | Positive resist composition and pattern forming method using the same | Toru Tsuchihashi, Kazuyoshi Mizutani, Jiro Yokoyama, Shinichi Sugiyama | 2011-04-12 |
| 7799506 | Positive resist composition and pattern forming method using the same | Shinichi Sugiyama | 2010-09-21 |
| 7592118 | Positive resist composition and pattern forming method using the same | Kazuyoshi Mizutani, Shinichi Sugiyama | 2009-09-22 |
| 7498116 | Resist composition and pattern formation method using the same | Shinichi Sugiyama | 2009-03-03 |