Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311294 | Chemical liquid purification method and chemical liquid | Tetsuya KAMIMURA, Yukihisa Kawada | 2025-05-27 |
| 12210287 | Resist pattern forming method and semiconductor chip manufacturing method | Tetsuya KAMIMURA, Yukihisa Kawada | 2025-01-28 |
| 11976001 | Chemical liquid storage body | Tetsuya KAMIMURA, Yukihisa Kawada | 2024-05-07 |
| 11958005 | Chemical liquid purification method and chemical liquid | Tetsuya KAMIMURA, Yukihisa Kawada | 2024-04-16 |
| 11491428 | Chemical liquid purification method and chemical liquid | Tetsuya KAMIMURA, Yukihisa Kawada | 2022-11-08 |
| 11351503 | Chemical liquid purification method | Tetsuya KAMIMURA, Yukihisa Kawada | 2022-06-07 |
| 9454079 | Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern | Akinori Shibuya, Yoko TOKUGAWA, Tomoki Matsuda, Junichi Ito, Shohei Kataoka +4 more | 2016-09-27 |
| 8802349 | Actinic ray-sensitive or radiation-sensitive resin composition and resist film and pattern forming method using the composition | Shuji Hirano, Hiroshi Saegusa, Kaoru Iwato, Yusuke Iizuka | 2014-08-12 |
| 8431330 | Surface-treating agent for pattern formation and pattern-forming method using the surface-treating agent | Wataru HOSHINO, Hideaki Tsubaki | 2013-04-30 |
| 8088566 | Surface-treating agent for pattern formation and pattern-forming method using the surface-treating agent | Wataru HOSHINO, Hideaki Tsubaki | 2012-01-03 |