Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311294 | Chemical liquid purification method and chemical liquid | Tetsuya KAMIMURA, Masahiro Yoshidome | 2025-05-27 |
| 12253801 | Solution, solution storage body, actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and manufacturing method of semiconductor device | Tetsuya KAMIMURA, Satomi Takahashi | 2025-03-18 |
| 12210287 | Resist pattern forming method and semiconductor chip manufacturing method | Tetsuya KAMIMURA, Masahiro Yoshidome | 2025-01-28 |
| 11976001 | Chemical liquid storage body | Tetsuya KAMIMURA, Masahiro Yoshidome | 2024-05-07 |
| 11958005 | Chemical liquid purification method and chemical liquid | Tetsuya KAMIMURA, Masahiro Yoshidome | 2024-04-16 |
| 11491428 | Chemical liquid purification method and chemical liquid | Tetsuya KAMIMURA, Masahiro Yoshidome | 2022-11-08 |
| 11429018 | Method of manufacturing chemical fluid for manufacturing electronic material, pattern forming method, method of manufacturing semiconductor device, chemical fluid for manufacturing electronic material, container, and quality inspection method | Tetsuya Shimizu, Tsukasa Yamanaka | 2022-08-30 |
| 11351503 | Chemical liquid purification method | Tetsuya KAMIMURA, Masahiro Yoshidome | 2022-06-07 |