Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7129485 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2006-10-31 |
| 7109483 | Method for inspecting substrate, substrate inspecting system and electron beam apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama +6 more | 2006-09-19 |
| 7109484 | Sheet beam-type inspection apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +3 more | 2006-09-19 |
| 7098045 | Processing method utilizing an apparatus to be sealed against workpiece | Nobuharu Noji, Hiroshi Sobukawa, Masami Nagayama, Koji Ono | 2006-08-29 |
| 7095022 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2006-08-22 |
| 7049585 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +3 more | 2006-05-23 |
| 6869890 | Processing apparatus to be sealed against workpiece | Nobuharu Noji, Hiroshi Sobukawa, Masami Nagayama, Koji Ono | 2005-03-22 |
| 6855929 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2005-02-15 |
| 6704415 | Echo canceler | Hiroshi Katayama, Yasushi Yamazaki, Hitoshi Matsuzawa, Yoshihiro Tomita, Hisanari Kimura | 2004-03-09 |
| 6593152 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2003-07-15 |
| D425117 | Sheet for use in making solid objects | — | 2000-05-16 |
| 5693195 | Method of irradiation with electron beams | Takeshi Yoshioka, Tatsuya Nishimura | 1997-12-02 |
| 5543615 | Beam charge exchanging apparatus | Tomoyuki Yahiro, Masahiro Hatakeyama | 1996-08-06 |