Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5632868 | Method and apparatus for generating ozone and methods of its use | Minoru Harada, Ryoichi Shinjo, Rempei Nakata, Kunihiro Miyazaki, Naruhiko Kaji +1 more | 1997-05-27 |
| 5500559 | Semiconductor device and method for manufacturing the same | Masahiro Miyata, Hirokazu Ezawa, Naoaki Ogure, Takeyuki Ohdaira, Hiroaki Inoue +1 more | 1996-03-19 |
| 5476414 | Polishing apparatus | Masayoshi Hirose, Seiji Ishikawa, Norio Kimura, You Ishii | 1995-12-19 |
| 5236562 | Method for discharging hydrogen from a vacuum vessel using a roughing vacuum pump and a turbo-molecular pump | Katsuya Okumura, Haruo Okano, Akio Shibata | 1993-08-17 |
| 5062271 | Evacuation apparatus and evacuation method | Katsuya Okumura, Fumio Kuriyama, Yukio Murai, Hiroshi Sobukawa | 1991-11-05 |
| 4926648 | Turbomolecular pump and method of operating the same | Katsuya Okumura, Fumio Kuriyama, Yukio Murai, Hiroshi Sobukawa | 1990-05-22 |
| 4906257 | Method of and apparatus for treating waste gas from semiconductor manufacturing process | Akira Fukunaga | 1990-03-06 |