| 10281492 |
Shielded probe systems with controlled testing environments |
Michael Teich, Walter Matthias Clauss, Swen Schmiedchen |
2019-05-07 |
| 9784763 |
Shielded probe systems with controlled testing environments |
Michael Teich, Walter Matthias Clauss, Swen Schmiedchen |
2017-10-10 |
| 9395411 |
Method for testing a test substrate under defined thermal conditions and thermally conditionable prober |
Joerg Kiesewetter, Stojan Kanev, Michael Teich, Axel Schmidt |
2016-07-19 |
| 8680879 |
Chuck for supporting and retaining a test substrate and a calibration substrate |
Andrej Rumiantsev, Stojan Kanev, Steffen Schott |
2014-03-25 |
| 8497693 |
Method for testing a test substrate under defined thermal conditions and thermally conditionable prober |
Joerg Kiesewetter, Stojan Kanev, Michael Teich, Axel Schmidt |
2013-07-30 |
| 8278951 |
Probe station for testing semiconductor substrates and comprising EMI shielding |
Stojan Kanev, Hans-Jurgen Fleischer, Stefan Kreissig, Axel Schmidt, Andreas Kittlaus |
2012-10-02 |
| 8240650 |
Chuck with triaxial construction |
Michael Teich, Axel Schmidt, Stojan Kanev, Jorg Kiesewetter |
2012-08-14 |
| 7999563 |
Chuck for supporting and retaining a test substrate and a calibration substrate |
Andrej Rumiantsev, Stojan Kanev, Steffen Scott |
2011-08-16 |
| 7652491 |
Probe support with shield for the examination of test substrates under use of probe supports |
Stojan Kanev, Hans-Jurgen Fleischer, Stefan Kreissig, Axel Schmidt, Andreas Kittlaus |
2010-01-26 |
| 7265536 |
Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station |
Joerg Kiesewetter, Axel Schmidt, Stefan Kreissig, Ralph Juettner, Hans-Juergen Fleischer |
2007-09-04 |
| 7038441 |
Test apparatus with loading device |
Stefan Kreissig, Alf Wachtveitl, Michael Teich, Stefan Schneidewind, Claus Dietrich +2 more |
2006-05-02 |