| 9395411 |
Method for testing a test substrate under defined thermal conditions and thermally conditionable prober |
Stojan Kanev, Michael Teich, Karsten Stoll, Axel Schmidt |
2016-07-19 |
| 8497693 |
Method for testing a test substrate under defined thermal conditions and thermally conditionable prober |
Stojan Kanev, Michael Teich, Karsten Stoll, Axel Schmidt |
2013-07-30 |
| 8402848 |
Probe holder |
Stojan Kanev, Stefan Kreissig |
2013-03-26 |
| 8072586 |
Arrangement and method for focusing a multiplane image acquisition on a prober |
Michael Teich, Ulf Hackius, Juliane Busch, Axel Becker |
2011-12-06 |
| 7282930 |
Device for testing thin elements |
Uwe Beier, Dietmar Runge, Stefan Kreissig, Steffen Grauer, Matthias Rottka +1 more |
2007-10-16 |
| 7265536 |
Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station |
Axel Schmidt, Stefan Kreissig, Karsten Stoll, Ralph Juettner, Hans-Juergen Fleischer |
2007-09-04 |
| 7235990 |
Probe station comprising a bellows with EMI shielding capabilities |
Stefan Kreissig |
2007-06-26 |