Botho Hirschfeld — 8 Patents at Cascade Microtech

Botho Hirschfeld has been granted 8 US patents while listed as an inventor at Cascade Microtech. The first was granted in 2004 and the most recent in June 2016. Botho Hirschfeld ranks #600,572 of 4,157,543 US inventors in our database (top 14.4%). Patent records list Botho Hirschfeld in Dresden, DE.

Issued Patents All Time

Showing 1–8 of 8 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9377423	Systems and methods for handling substrates at below dew point temperatures	Axel Becker	2016-06-28
9373533	Systems and methods for providing wafer access in a wafer processing system	Frank Fehrmann, Stojan Kanev	2016-06-21	$1,812,000
9194885	Modular prober and method for operating same	Stojan Kanev, Axel Becker, Ulf Hackius	2015-11-24	$2,100,000
9110131	Method and device for contacting a row of contact areas with probe tips	Claus Dietrich, Stojan Kanev, Frank Fehrmann	2015-08-18	$1,979,000
8922229	Method for measurement of a power device	Stojan Kanev	2014-12-30	$2,079,000
8344744	Probe station for on-wafer-measurement under EMI-shielding	Axel Schmidt, Stojan Kanev, Andrej Rumiantsev, Michael Teich	2013-01-01
7282930	Device for testing thin elements	Uwe Beier, Dietmar Runge, Stefan Kreissig, Steffen Grauer, Matthias Rottka +1 more	2007-10-16
6688156	Tester for pressure sensors	Claus Dietrich, Dietmar Runge, Michael Teich, Stefan Schneidewind	2004-02-10

Botho Hirschfeld — 8 Patents

Issued Patents All Time

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