Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377423 | Systems and methods for handling substrates at below dew point temperatures | Axel Becker | 2016-06-28 |
| 9373533 | Systems and methods for providing wafer access in a wafer processing system | Frank Fehrmann, Stojan Kanev | 2016-06-21 |
| 9194885 | Modular prober and method for operating same | Stojan Kanev, Axel Becker, Ulf Hackius | 2015-11-24 |
| 9110131 | Method and device for contacting a row of contact areas with probe tips | Claus Dietrich, Stojan Kanev, Frank Fehrmann | 2015-08-18 |
| 8922229 | Method for measurement of a power device | Stojan Kanev | 2014-12-30 |
| 8344744 | Probe station for on-wafer-measurement under EMI-shielding | Axel Schmidt, Stojan Kanev, Andrej Rumiantsev, Michael Teich | 2013-01-01 |
| 7282930 | Device for testing thin elements | Uwe Beier, Dietmar Runge, Stefan Kreissig, Steffen Grauer, Matthias Rottka +1 more | 2007-10-16 |
| 6688156 | Tester for pressure sensors | Claus Dietrich, Dietmar Runge, Michael Teich, Stefan Schneidewind | 2004-02-10 |