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Systems and methods for handling substrates at below dew point temperatures |
Axel Becker |
2016-06-28 |
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Systems and methods for providing wafer access in a wafer processing system |
Frank Fehrmann, Stojan Kanev |
2016-06-21 |
| 9194885 |
Modular prober and method for operating same |
Stojan Kanev, Axel Becker, Ulf Hackius |
2015-11-24 |
| 9110131 |
Method and device for contacting a row of contact areas with probe tips |
Claus Dietrich, Stojan Kanev, Frank Fehrmann |
2015-08-18 |
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Method for measurement of a power device |
Stojan Kanev |
2014-12-30 |
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Probe station for on-wafer-measurement under EMI-shielding |
Axel Schmidt, Stojan Kanev, Andrej Rumiantsev, Michael Teich |
2013-01-01 |
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Device for testing thin elements |
Uwe Beier, Dietmar Runge, Stefan Kreissig, Steffen Grauer, Matthias Rottka +1 more |
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Tester for pressure sensors |
Claus Dietrich, Dietmar Runge, Michael Teich, Stefan Schneidewind |
2004-02-10 |