Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8831170 | Mirror with a mirror carrier and projection exposure apparatus | Rutger Wevers, Andreas Seifert, Guenther Dengel | 2014-09-09 |
| 8587767 | Illumination optics for EUV microlithography and related system and apparatus | Damian Fiolka, Berndt Warm, Christian Steigerwald, Martin Endres, Ralf Stuetzle +6 more | 2013-11-19 |
| 8441747 | Optical module with minimized overrun of the optical element | Willi Heintel, Hagen Federau, Harald Kirchner, Bernhard Geuppert, Ulrich Bingel +1 more | 2013-05-14 |
| 8345219 | Method and apparatus for setting an illumination optical unit | Stig Bieling, Artur Hoegele | 2013-01-01 |