Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12275084 | Dynamic beam deflection and shaping for laser process | Axel Heinrici, Paul Sonntag, Patrick Kühl, Matthias Waschicek | 2025-04-15 |
| 12162093 | High leverage beam wobbling | Axel Heinrici, Paul Sonntag, Patrick Kühl | 2024-12-10 |
| 11041997 | Socket for optical fiber plug | — | 2021-06-22 |
| 8831170 | Mirror with a mirror carrier and projection exposure apparatus | Andreas Seifert, Joachim Hartjes, Guenther Dengel | 2014-09-09 |