Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9684243 | Blocking element for protecting optical elements in projection exposure apparatuses | Joachim Hartjes, Bernhard Sitek, Maik-René Piatkowski | 2017-06-20 |
| 9671584 | Method and cooling system for cooling an optical element for EUV applications | Joachim Hartjes | 2017-06-06 |
| 9041905 | Optical arrangement, in particular in a projection exposure apparatus for EUV lithography | Dirk Heinrich Ehm, Stefan Schmidt | 2015-05-26 |
| 8831170 | Mirror with a mirror carrier and projection exposure apparatus | Rutger Wevers, Andreas Seifert, Joachim Hartjes | 2014-09-09 |
| 8643825 | Microlithography illumination systems, components and methods | Berndt Warm | 2014-02-04 |
| 7990520 | Microlithography illumination systems, components and methods | Berndt Warm | 2011-08-02 |
| 7858957 | Illumination optics for projection microlithography | Berndt Warm | 2010-12-28 |