Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6984362 | Processing apparatus, measuring apparatus, and device manufacturing method | Shinichi Hara, Yutaka Tanaka, Shigeru Terashima, Shin Matsui | 2006-01-10 |
| 6897456 | Differential pumping system and exposure apparatus | Akira Miyake, Nobuaki Ogushi | 2005-05-24 |
| 6891172 | Differential pumping system and exposure apparatus | Nobuaki Ohgushi, Akira Miyake, Jun Ito | 2005-05-10 |
| 6809799 | Processing system and device manufacturing method using the same | Yutaka Tanaka, Hidehiko Fujioka | 2004-10-26 |
| 6616898 | Processing apparatus with pressure control and gas recirculation system | Shinichi Hara, Yutaka Tanaka, Shigeru Terashima, Shin Matsui | 2003-09-09 |
| 6618146 | Oscillation mechanism in exposure apparatus | — | 2003-09-09 |
| 6406245 | Processing system and device manufacturing method using the same | Yutaka Tanaka, Hidehiko Fujioka | 2002-06-18 |
| 6376047 | Band body | — | 2002-04-23 |
| 6253425 | Slide fastener | Hideyuki Matsushima | 2001-07-03 |
| 6256371 | X-ray illumination device, x-ray illumination method, and an x-ray exposing device and device manufacturing method using the same | Yutaka Watanabe | 2001-07-03 |
| 6219400 | X-ray optical system and X-ray exposure apparatus | Yutaka Watanabe | 2001-04-17 |
| 6144719 | Exposure method, exposure device and device producing method | Yutaka Tanaka | 2000-11-07 |
| 6097790 | Pressure partition for X-ray exposure apparatus | Eiji Sakamoto | 2000-08-01 |
| 6081581 | X-ray illumination system and X-ray exposure apparatus | — | 2000-06-27 |
| 6078640 | X-ray exposure apparatus | Takeshi Miyachi | 2000-06-20 |
| 6009144 | X-ray system and X-ray exposure apparatus | Nobuaki Ogushi | 1999-12-28 |
| 5871587 | Processing system for semiconductor device manufacture of otherwise | Hidehiko Fujioka, Yoshito Yoneyama | 1999-02-16 |
| 5828572 | Processing System and semiconductor device production method using the same including air conditioning control in operational zones | Hidehiko Fujioka, Yoshito Yoneyama | 1998-10-27 |
| 5746562 | Processing system and device manufacturing method using the same | Yutaka Tanaka, Hidehiko Fujioka | 1998-05-05 |
| 5467637 | Method of measuring gas purity information, chamber unit and exposure unit using the method and a device production method | Hidehiko Fujioka | 1995-11-21 |
| 5448612 | X-ray exposure apparatus | Kazuyuki Kasumi, Naoto Abe, Ryuichi Ebinuma | 1995-09-05 |
| 5317615 | Exposure apparatus | Ryuichi Ebinuma, Nobutoshi Mizusawa, Takao Kariya, Shigeyuki Suda, Shunichi Uzawa | 1994-05-31 |